Browsing byAuthorZschech, E
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| Issue Date | Title | Author(s) |
|---|---|---|
| 2013-06-01 | Nanoindentation for reliability assessment of ULK films and interconnects structures | Yeap, KB; Iacopi, F; Geisler, H; Hangen, U; Zschech, E |
| Issue Date | Title | Author(s) |
|---|---|---|
| 2013-06-01 | Nanoindentation for reliability assessment of ULK films and interconnects structures | Yeap, KB; Iacopi, F; Geisler, H; Hangen, U; Zschech, E |