The effect of plasma immersion ion implantation on the contact pressure and composition of titanium nitride thin films

Publisher:
Elsevier Science Sa
Publication Type:
Journal Article
Citation:
Surface and Coatings Technology, 2006, 201 (1-2), pp. 396 - 400
Issue Date:
2006-01
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The effect of plasma immersion ion implantation on the indentation hardness as measured by contact pressure and composition of cathodic are deposited TiN thin films was investigated. According to Auger electron spectroscopy results, increasing the pulse
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