Enhanced high speed SE imaging using a VPSEM using a Frisch Grid

Cambridge university Press
Publication Type:
Conference Proceeding
Proceedings of Microscopy & Microanalysis 12, Suppl. 2 2006, 2006, pp. 1480 - 1481
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Secondary electron (SE) imaging in a variable pressure SEM has necessitated the development of new detector technologies. One approach is to measure the charge, Q, induced on a positive electrode placed at some distance, r, from the specimen stage which is a ground potential. Gas ionization by sufficiently energetic SEs produces electron-ion pairs which are charge separated by the applied electric field. Electrons drift towards the anode causing further gas ionization in a cascade process, and the ions drift towards the stage (cathode). The total Q induced at the anode will include charge components induced by the motion of both electrons, QE, and ions, QI.
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