Nanocapacitive circuit elements

Amer Chemical Soc
Publication Type:
Journal Article
ACS Nano, 2008, 2 (8), pp. 1615 - 1619
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Natural lithography was used to prepare arrays of nanoscale capacitors on silicon. The capacitance was verified by a novel technique based on the interaction of a charged substrate with the electron beam of a scanning electron microscope. The nanocapacit
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