Three-Dimensional Electron Energy Deposition Modeling of Cathodoluminescence Emission near Threading Dislocations in GaN and Electron-Beam Lithography Exposure Parameters for a PMMA Resist

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dc.contributor.author Demers, H
dc.contributor.author Poirier-Demers, N
dc.contributor.author Phillips, MR
dc.contributor.author de Jonge, N
dc.contributor.author Drouin, D
dc.date.accessioned 2014-04-03T01:22:18Z
dc.date.issued 2012-12
dc.identifier.citation MICROSCOPY AND MICROANALYSIS, 2012, 18 (6), pp. 1220 - 1228
dc.identifier.issn 1431-9276
dc.identifier.other C1 en_US
dc.identifier.uri http://hdl.handle.net/10453/22781
dc.relation.isbasedon 10.1017/S1431927612013414
dc.title Three-Dimensional Electron Energy Deposition Modeling of Cathodoluminescence Emission near Threading Dislocations in GaN and Electron-Beam Lithography Exposure Parameters for a PMMA Resist
dc.type Journal Article
dc.description.version Published
dc.description.version Published
dc.parent MICROSCOPY AND MICROANALYSIS
dc.journal.volume 6
dc.journal.volume 18
dc.journal.number 6 en_US
dc.publocation New York en_US
dc.identifier.startpage 1220 en_US
dc.identifier.endpage 1228 en_US
dc.cauo.name SCI.Faculty of Science en_US
dc.conference Verified OK en_US
dc.for 0912 Materials Engineering
dc.for 0204 Condensed Matter Physics
dc.personcode 810070
dc.percentage 50 en_US
dc.classification.name Condensed Matter Physics en_US
dc.classification.type FOR-08 en_US
dc.edition en_US
dc.custom en_US
dc.date.activity en_US
dc.location.activity en_US
dc.description.keywords cathodoluminescence (CL)
dc.description.keywords electron-beam lithography
dc.description.keywords energy deposition
dc.description.keywords Monte Carlo simulations
dc.description.keywords resist
dc.description.keywords threading dislocation
dc.description.keywords three-dimensional (3D)
pubs.embargo.period Not known
pubs.organisational-group /University of Technology Sydney
pubs.organisational-group /University of Technology Sydney/Faculty of Science
pubs.organisational-group /University of Technology Sydney/Strength - Materials and Technology for Energy Efficiency
utslib.copyright.status Closed Access
utslib.copyright.date 2015-04-15 12:17:09.805752+10
pubs.consider-herdc true
utslib.collection.history Closed (ID: 3)


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