Three-Dimensional Electron Energy Deposition Modeling of Cathodoluminescence Emission near Threading Dislocations in GaN and Electron-Beam Lithography Exposure Parameters for a PMMA Resist

DSpace/Manakin Repository

Search OPUS


Advanced Search

Browse

My Account

Show simple item record

dc.contributor.author Demers, H
dc.contributor.author Poirier-Demers, N
dc.contributor.author Phillips, MR
dc.contributor.author de Jonge, N
dc.contributor.author Drouin, D
dc.date.accessioned 2014-04-03T01:22:18Z
dc.date.issued 2012-12-01
dc.identifier.citation MICROSCOPY AND MICROANALYSIS, 2012, 18 (6), pp. 1220 - 1228 (9)
dc.identifier.issn 1431-9276
dc.identifier.other C1 en_US
dc.identifier.uri http://hdl.handle.net/10453/22781
dc.language English
dc.publisher CAMBRIDGE UNIV PRESS
dc.relation.isbasedon 10.1017/S1431927612013414
dc.subject Science & Technology, Technology, Materials Science, Multidisciplinary, Microscopy, Materials Science, MATERIALS SCIENCE, MULTIDISCIPLINARY, MICROSCOPY, cathodoluminescence (CL), electron-beam lithography, energy deposition, Monte Carlo simulations, resist, threading dislocation, three-dimensional (3D), MONTE-CARLO-SIMULATION, MOTT CROSS-SECTION, C-LANGUAGE, STOPPING POWER, THIN-FILMS, CASINO, CODE, MICROANALYSIS, RESOLUTION, cathodoluminescence (CL), electron-beam lithography, energy deposition, Monte Carlo simulations, resist, threading dislocation, three-dimensional (3D), MONTE-CARLO-SIMULATION, MOTT CROSS-SECTION, C-LANGUAGE, STOPPING POWER, THIN-FILMS, CASINO, CODE, MICROANALYSIS, MICROSCOPY, RESOLUTION, Microscopy
dc.subject Science & Technology; Technology; Materials Science, Multidisciplinary; Microscopy; Materials Science; MATERIALS SCIENCE, MULTIDISCIPLINARY; MICROSCOPY; cathodoluminescence (CL); electron-beam lithography; energy deposition; Monte Carlo simulations; resist; threading dislocation; three-dimensional (3D); MONTE-CARLO-SIMULATION; MOTT CROSS-SECTION; C-LANGUAGE; STOPPING POWER; THIN-FILMS; CASINO; CODE; MICROANALYSIS; RESOLUTION; cathodoluminescence (CL); electron-beam lithography; energy deposition; Monte Carlo simulations; resist; threading dislocation; three-dimensional (3D); MONTE-CARLO-SIMULATION; MOTT CROSS-SECTION; C-LANGUAGE; STOPPING POWER; THIN-FILMS; CASINO; CODE; MICROANALYSIS; MICROSCOPY; RESOLUTION; Microscopy
dc.title Three-Dimensional Electron Energy Deposition Modeling of Cathodoluminescence Emission near Threading Dislocations in GaN and Electron-Beam Lithography Exposure Parameters for a PMMA Resist
dc.type Journal Article
dc.description.version Published
dc.parent MICROSCOPY AND MICROANALYSIS
dc.journal.volume 6
dc.journal.volume 18
dc.journal.number 6 en_US
dc.publocation New York en_US
dc.identifier.startpage 1220 en_US
dc.identifier.endpage 1228 en_US
dc.cauo.name SCI.Faculty of Science en_US
dc.conference Verified OK en_US
dc.for 0912 Materials Engineering
dc.for 0204 Condensed Matter Physics
dc.personcode 0000090415 en_US
dc.personcode 0000090416 en_US
dc.personcode 810070 en_US
dc.personcode 0000090418 en_US
dc.personcode 0000021798 en_US
dc.percentage 50 en_US
dc.classification.name Condensed Matter Physics en_US
dc.classification.type FOR-08 en_US
dc.edition en_US
dc.custom en_US
dc.date.activity en_US
dc.location.activity en_US
dc.description.keywords MONTE-CARLO-SIMULATION; MOTT CROSS-SECTION; C-LANGUAGE; STOPPING POWER; THIN-FILMS; CASINO; CODE; MICROANALYSIS; MICROSCOPY; RESOLUTION en_US
dc.description.keywords Science & Technology
dc.description.keywords Technology
dc.description.keywords Materials Science, Multidisciplinary
dc.description.keywords Microscopy
dc.description.keywords Materials Science
dc.description.keywords MATERIALS SCIENCE, MULTIDISCIPLINARY
dc.description.keywords MICROSCOPY
dc.description.keywords cathodoluminescence (CL)
dc.description.keywords electron-beam lithography
dc.description.keywords energy deposition
dc.description.keywords Monte Carlo simulations
dc.description.keywords resist
dc.description.keywords threading dislocation
dc.description.keywords three-dimensional (3D)
dc.description.keywords MONTE-CARLO-SIMULATION
dc.description.keywords MOTT CROSS-SECTION
dc.description.keywords C-LANGUAGE
dc.description.keywords STOPPING POWER
dc.description.keywords THIN-FILMS
dc.description.keywords CASINO
dc.description.keywords CODE
dc.description.keywords MICROANALYSIS
dc.description.keywords RESOLUTION
pubs.embargo.period Not known
pubs.organisational-group /University of Technology Sydney
pubs.organisational-group /University of Technology Sydney/Faculty of Science
pubs.organisational-group /University of Technology Sydney/Strength - Materials and Technology for Energy Efficiency


Files in this item

This item appears in the following Collection(s)

Show simple item record