Electron beam current loss at the high-vacuum-high-pressure boundary in the environmental scanning electron microscope

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dc.contributor.author Danilatos, GD
dc.contributor.author Phillips, MR
dc.contributor.author Nailon, JV
dc.date.accessioned 2009-11-12T05:29:02Z
dc.date.issued 2001-09
dc.date.issued 2001-09
dc.identifier.citation Microscopy and Microanalysis, 2001, 7 (5), pp. 397 - 406
dc.identifier.citation Microscopy and Microanalysis, 2001, 7 (5), pp. 397 - 406
dc.identifier.issn 1431-9276
dc.identifier.other C1 en_US
dc.identifier.uri http://hdl.handle.net/10453/3276
dc.description.abstract A significant loss in electron probe current can occur before the electron beam enters the specimen chamber of an environmental scanning electron microscope (ESEM). This loss results from electron scattering in a gaseous jet formed inside and downstream (above) the pressure-limiting aperture (PLA), which separates the high-pressure and high-vacuum regions of the microscope. The electron beam loss above the PLA has been calculated for three different ESEMs, each with a different PLA geometry: an ElectroScan E3, a Philips XL30 ESEM, and a prototype instrument. The mass thickness of gas above the PLA in each case has been determined by Monte Carlo simulation of the gas density variation in the gas jet. It has been found that the PLA configurations used in the commercial instruments produce considerable loss in the electron probe current that dramatically degrades their performance at high chamber pressure and low accelerating voltage. These detrimental effects are minimized in the prototype instrument, which has an optimized thin-foil PLA design.
dc.description.abstract A significant loss in electron probe current can occur before the electron beam enters the specimen chamber of an environmental scanning electron microscope (ESEM). This loss results from electron scattering in a gaseous jet formed inside and downstream (above) the pressure-limiting aperture (PLA), which separates the high-pressure and high-vacuum regions of the microscope. The electron beam loss above the PLA has been calculated for three different ESEMs, each with a different PLA geometry: an ElectroScan E3, a Philips XL30 ESEM, and a prototype instrument. The mass thickness of gas above the PLA in each case has been determined by Monte Carlo simulation of the gas density variation in the gas jet. It has been found that the PLA configurations used in the commercial instruments produce considerable loss in the electron probe current that dramatically degrades their performance at high chamber pressure and low accelerating voltage. These detrimental effects are minimized in the prototype instrument, which has an optimized thin-foil PLA design.
dc.language eng
dc.language eng
dc.title Electron beam current loss at the high-vacuum-high-pressure boundary in the environmental scanning electron microscope
dc.type Journal Article
dc.description.version Published
dc.parent Microscopy and Microanalysis
dc.parent Microscopy and Microanalysis
dc.journal.volume 5
dc.journal.volume 7
dc.journal.number 5 en_US
dc.publocation New York, USA en_US
dc.identifier.startpage 397 en_US
dc.identifier.endpage 406 en_US
dc.cauo.name SCI.Physics and Advanced Materials en_US
dc.conference Verified OK en_US
dc.for 0912 Materials Engineering
dc.for 0204 Condensed Matter Physics
dc.personcode 810070
dc.percentage 80 en_US
dc.classification.name Condensed Matter Physics en_US
dc.classification.type FOR-08 en_US
dc.description.keywords Differential pumping
dc.description.keywords Differential pumping
dc.description.keywords Electron loss
dc.description.keywords Electron loss
dc.description.keywords Electron scattering
dc.description.keywords Electron scattering
dc.description.keywords Electron skirt
dc.description.keywords Electron skirt
dc.description.keywords Environmental scanning electron microscope
dc.description.keywords Environmental scanning electron microscope
dc.description.keywords Gas jet
dc.description.keywords Gas jet
dc.description.keywords Image noise
dc.description.keywords Image noise
dc.description.keywords Pressure limiting aperture
dc.description.keywords Pressure limiting aperture
pubs.embargo.period Not known
pubs.organisational-group /University of Technology Sydney
pubs.organisational-group /University of Technology Sydney/Faculty of Science
pubs.organisational-group /University of Technology Sydney/Strength - Materials and Technology for Energy Efficiency
utslib.copyright.status Open Access
utslib.copyright.date 2015-04-15 12:23:47.074767+10
pubs.consider-herdc true
utslib.collection.history General (ID: 2)


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