X-ray reflectivity study of radio frequency sputtered silicon oxide on silicon

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dc.contributor.author Solina, DM
dc.contributor.author Cheary, RW
dc.contributor.author Kalceff, W
dc.contributor.author McCredie, G
dc.date.accessioned 2009-06-26T04:10:34Z
dc.date.issued 2005-10-01
dc.identifier.citation THIN SOLID FILMS, 2005, 489 (1-2), pp. 37 - 41 (5)
dc.identifier.issn 0040-6090
dc.identifier.other C1 en_US
dc.identifier.uri http://hdl.handle.net/10453/479
dc.language English
dc.publisher ELSEVIER SCIENCE SA
dc.relation.isbasedon 10.1016/j.tsf.2005.04.092
dc.subject Science & Technology, Technology, Physical Sciences, Materials Science, Multidisciplinary, Materials Science, Coatings & Films, Physics, Applied, Physics, Condensed Matter, Materials Science, Physics, MATERIALS SCIENCE, COATINGS & FILMS, MATERIALS SCIENCE, MULTIDISCIPLINARY, PHYSICS, APPLIED, PHYSICS, CONDENSED MATTER, X-ray reflectivity, silicon dioxide, silicon, sputtering, SIO2 THIN-FILMS, PHOTOELECTRON-SPECTROSCOPY, INTERFACIAL STRUCTURE, MULTILAYER COATINGS, MO/SIO2 MULTILAYERS, OPTICAL-PROPERTIES, ATOMIC DEFECTS, SURFACE, XPS, DIOXIDE, X-ray reflectivity, silicon dioxide, silicon, sputtering, X-ray reflectivity, silicon dioxide, silicon, sputtering, Applied Physics
dc.subject Science & Technology; Technology; Physical Sciences; Materials Science, Multidisciplinary; Materials Science, Coatings & Films; Physics, Applied; Physics, Condensed Matter; Materials Science; Physics; MATERIALS SCIENCE, COATINGS & FILMS; MATERIALS SCIENCE, MULTIDISCIPLINARY; PHYSICS, APPLIED; PHYSICS, CONDENSED MATTER; X-ray reflectivity; silicon dioxide; silicon; sputtering; SIO2 THIN-FILMS; PHOTOELECTRON-SPECTROSCOPY; INTERFACIAL STRUCTURE; MULTILAYER COATINGS; MO/SIO2 MULTILAYERS; OPTICAL-PROPERTIES; ATOMIC DEFECTS; SURFACE; XPS; DIOXIDE; X-ray reflectivity; silicon dioxide; silicon; sputtering; X-ray reflectivity; silicon dioxide; silicon; sputtering; Applied Physics
dc.title X-ray reflectivity study of radio frequency sputtered silicon oxide on silicon
dc.type Journal Article
dc.description.version Published
dc.parent THIN SOLID FILMS
dc.journal.volume 1-2
dc.journal.volume 489
dc.journal.number 1-2 en_US
dc.publocation Lausanne, Switzerland en_US
dc.identifier.startpage 37 en_US
dc.identifier.endpage 41 en_US
dc.cauo.name SCI.Faculty of Science en_US
dc.conference Verified OK en_US
dc.for 0204 Condensed Matter Physics
dc.personcode 101110 en_US
dc.personcode 723559 en_US
dc.personcode 800088 en_US
dc.personcode 820131 en_US
dc.percentage 100 en_US
dc.classification.name Condensed Matter Physics en_US
dc.classification.type FOR-08 en_US
dc.custom 1.647 en_US
dc.description.keywords X-ray reflectivity; silicon dioxide; silicon; sputtering en_US
dc.description.keywords Science & Technology
dc.description.keywords Technology
dc.description.keywords Physical Sciences
dc.description.keywords Materials Science, Multidisciplinary
dc.description.keywords Materials Science, Coatings & Films
dc.description.keywords Physics, Applied
dc.description.keywords Physics, Condensed Matter
dc.description.keywords Materials Science
dc.description.keywords Physics
dc.description.keywords MATERIALS SCIENCE, COATINGS & FILMS
dc.description.keywords MATERIALS SCIENCE, MULTIDISCIPLINARY
dc.description.keywords PHYSICS, APPLIED
dc.description.keywords PHYSICS, CONDENSED MATTER
dc.description.keywords X-ray reflectivity
dc.description.keywords silicon dioxide
dc.description.keywords silicon
dc.description.keywords sputtering
dc.description.keywords SIO2 THIN-FILMS
dc.description.keywords PHOTOELECTRON-SPECTROSCOPY
dc.description.keywords INTERFACIAL STRUCTURE
dc.description.keywords MULTILAYER COATINGS
dc.description.keywords MO/SIO2 MULTILAYERS
dc.description.keywords OPTICAL-PROPERTIES
dc.description.keywords ATOMIC DEFECTS
dc.description.keywords SURFACE
dc.description.keywords XPS
dc.description.keywords DIOXIDE
dc.staffid 820131 en_US
pubs.embargo.period Not known
pubs.organisational-group /University of Technology Sydney
pubs.organisational-group /University of Technology Sydney/Faculty of Science
pubs.organisational-group /University of Technology Sydney/Faculty of Science/School of Physics and Advanced Materials


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