Metal-insulator-metal (MIM) nanocapacitors and effects of material properties on their operation

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dc.contributor.author Ekanayake, SR
dc.contributor.author Ford, M
dc.contributor.author Cortie, M
dc.date.accessioned 2009-12-21T03:51:18Z
dc.date.issued 2004
dc.identifier.citation Materials Forum, 2004, 27 pp. 15 - 20
dc.identifier.issn 0883-2900
dc.identifier.other C1 en_US
dc.identifier.uri http://hdl.handle.net/10453/5687
dc.description.abstract Metal-insulator-metal (MIM) capacitors play an important part in many integrated electronic circuits in the areas of analog, microwave, and radio frequency systems. However the transverse dimensions of current MIM capacitors are in the micrometer scale. If integrated circuits continue to be miniaturized, the capacitor, alongside other components, must also be miniaturized to realize nanoelectronic circuits and systems. This article presents a novel device, the nanocapacitor, of which the dimensions are constrained to nanoscale in longitudinal and transverse directions, and discusses the effects of material properties on their operation. In particular, this work discusses the effects of dielectric constant, dielectric strength, and quantum electrical phenomena on achieving relatively high capacitances and capacitance densities in nanocapacitors. © Institute of Materials Engineering Australasia Ltd - Materials Forum Volume 27 - Published 2004.
dc.language eng
dc.subject Capacitors, Dielectric thin films, Nanoelectronic devices, Single electron devices, Materials
dc.subject Capacitors; Dielectric thin films; Nanoelectronic devices; Single electron devices; Materials
dc.title Metal-insulator-metal (MIM) nanocapacitors and effects of material properties on their operation
dc.type Journal Article
dc.description.version Published
dc.parent Materials Forum
dc.journal.volume 27
dc.journal.number en_US
dc.publocation Melbourne, Australia en_US
dc.identifier.startpage 15 en_US
dc.identifier.endpage 20 en_US
dc.cauo.name INT en_US
dc.conference Verified OK en_US
dc.conference 16th International Symposium on Ceramics in Medicine
dc.for 0306 Physical Chemistry (Incl. Structural)
dc.for 0204 Condensed Matter Physics
dc.personcode 014903 en_US
dc.personcode 020323 en_US
dc.personcode 020302 en_US
dc.percentage 60 en_US
dc.classification.name Condensed Matter Physics en_US
dc.classification.type FOR-08 en_US
dc.date.activity 2003-11-06
dc.location.activity Porto, PORTUGAL
dc.description.keywords Science & Technology
dc.description.keywords Technology
dc.description.keywords Engineering, Biomedical
dc.description.keywords Materials Science, Ceramics
dc.description.keywords Materials Science, Biomaterials
dc.description.keywords Materials Science, Composites
dc.description.keywords Engineering
dc.description.keywords Materials Science
dc.description.keywords adhesion
dc.description.keywords phosphate treatment
dc.description.keywords nanocoatings
dc.description.keywords zirconia
dc.description.keywords sol-gel
dc.description.keywords titanium
dc.description.keywords anodizing
dc.description.keywords FILMS
dc.description.keywords Capacitors
dc.description.keywords Dielectric thin films
dc.description.keywords Nanoelectronic devices
dc.description.keywords Single electron devices
dc.description.keywords Capacitors
dc.description.keywords Dielectric thin films
dc.description.keywords Nanoelectronic devices
dc.description.keywords Single electron devices
dc.description.keywords Capacitors
dc.description.keywords Dielectric thin films
dc.description.keywords Nanoelectronic devices
dc.description.keywords Single electron devices
dc.staffid 020302 en_US
pubs.embargo.period Not known
pubs.organisational-group /University of Technology Sydney
pubs.organisational-group /University of Technology Sydney/Faculty of Engineering and Information Technology
pubs.organisational-group /University of Technology Sydney/Faculty of Science
pubs.organisational-group /University of Technology Sydney/Strength - Materials and Technology for Energy Efficiency


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