Design of nanocapacitors and associated materials challenges

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Show simple item record Ekanayake, SR Cortie, MB Ford, MJ 2009-06-26T04:12:58Z 2004-04
dc.identifier.citation Current Applied Physics, 2004, 4 (2-4), pp. 250 - 254
dc.identifier.issn 1567-1739
dc.identifier.other C1 en_US
dc.description.abstract The International Technology Roadmap for Semiconductors (ITRS) projects that the spatial resolution of feature sizes in integrated circuits is rapidly approaching nanoscopic dimensions. Consequently, there is an active interest in the design of nanoscale circuit elements such as transistors, resistors, and capacitors. The properties of materials used to fabricate capacitors pose an important design factor, as with all circuit elements. We analyze the critical materials properties that would influence engineering nanocapacitors (nanoscopic capacitors), and show that at nanoscale, dielectric properties (dielectric constant, dielectric strength, and dielectric relaxation) determine the practicality of such capacitors. © 2003 Elsevier B.V. All rights reserved.
dc.language eng
dc.relation.hasversion Accepted manuscript version en_US
dc.relation.isbasedon 10.1016/j.cap.2003.11.021
dc.title Design of nanocapacitors and associated materials challenges
dc.type Journal Article
dc.parent Current Applied Physics
dc.journal.volume 2-4
dc.journal.volume 4
dc.journal.number 2-4 en_US
dc.publocation Amsterdam, The Netherlands en_US
dc.publocation Denmark
dc.identifier.startpage 250 en_US
dc.identifier.endpage 254 en_US INT en_US
dc.conference Verified OK en_US
dc.for 0204 Condensed Matter Physics
dc.personcode 020302
dc.personcode 020323
dc.personcode 014903
dc.percentage 100 en_US Condensed Matter Physics en_US
dc.classification.type FOR-08 en_US
dc.edition 1
dc.description.keywords Capacitors
dc.description.keywords Dielectric properties
dc.description.keywords Dielectric thin films
dc.description.keywords Nanoelectronic devices
pubs.embargo.period Not known
pubs.organisational-group /University of Technology Sydney
pubs.organisational-group /University of Technology Sydney/Faculty of Engineering and Information Technology
pubs.organisational-group /University of Technology Sydney/Faculty of Science
pubs.organisational-group /University of Technology Sydney/Strength - Materials and Technology for Energy Efficiency
utslib.copyright.status Closed Access 2015-04-15 12:23:47.074767+10
pubs.consider-herdc true
utslib.collection.history General Collection (ID: 346) [2015-05-15T14:11:25+10:00]
utslib.collection.history General (ID: 2)

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