High bandwidth secondary electron detection in variable pressure scanning electron microscopy using a Frisch grid

DSpace/Manakin Repository

Search OPUS


Advanced Search

Browse

My Account

Show simple item record

dc.contributor.author Morgan, SW
dc.contributor.author Phillips, MR
dc.date.accessioned 2010-05-28T09:42:53Z
dc.date.issued 2008-03-07
dc.identifier.citation Journal of Physics D: Applied Physics, 2008, 41 (5)
dc.identifier.citation Journal of Physics D: Applied Physics, 2008, 41 (5)
dc.identifier.issn 0022-3727
dc.identifier.other C1 en_US
dc.identifier.uri http://hdl.handle.net/10453/8392
dc.description.abstract The bandwidth and contrast of secondary electron (SE) images obtained using variable pressure scanning electron microscopy are enhanced when a grounded Frisch grid is placed between the SE detecting anode and the negatively biased stage. The improvement in SE image quality occurs as a consequence of the grounded Frisch grid electrostatically screening the 'slow' induced ion current signal, generated below the grid, from the induced current detected above the grid by the anode. Ion induced artefacts, such as image smearing at fast scan rates, are virtually eliminated using a Frisch grid. Gas amplification data are presented to illustrate that gas gain can be optimized by varying the Frisch grid-stage (amplification region) separation Frisch grid-anode (drift region) separation and stage bias. © 2008 IOP Publishing Ltd.
dc.description.abstract The bandwidth and contrast of secondary electron (SE) images obtained using variable pressure scanning electron microscopy are enhanced when a grounded Frisch grid is placed between the SE detecting anode and the negatively biased stage. The improvement in SE image quality occurs as a consequence of the grounded Frisch grid electrostatically screening the 'slow' induced ion current signal, generated below the grid, from the induced current detected above the grid by the anode. Ion induced artefacts, such as image smearing at fast scan rates, are virtually eliminated using a Frisch grid. Gas amplification data are presented to illustrate that gas gain can be optimized by varying the Frisch grid-stage (amplification region) separation Frisch grid-anode (drift region) separation and stage bias. © 2008 IOP Publishing Ltd.
dc.language eng
dc.language eng
dc.relation.isbasedon 10.1088/0022-3727/41/5/055504
dc.title High bandwidth secondary electron detection in variable pressure scanning electron microscopy using a Frisch grid
dc.type Journal Article
dc.description.version Published
dc.parent Journal of Physics D: Applied Physics
dc.parent Journal of Physics D: Applied Physics
dc.journal.volume 5
dc.journal.volume 41
dc.journal.number 5 en_US
dc.publocation Bristol en_US
dc.identifier.startpage 1 en_US
dc.identifier.endpage 6 en_US
dc.cauo.name SCI.Faculty of Science en_US
dc.conference Verified OK en_US
dc.for 0204 Condensed Matter Physics
dc.personcode 810070
dc.personcode 96088947
dc.percentage 100 en_US
dc.classification.name Condensed Matter Physics en_US
dc.classification.type FOR-08 en_US
dc.edition en_US
dc.custom en_US
dc.date.activity en_US
dc.location.activity ISI:000254153800050 en_US
pubs.embargo.period Not known
pubs.organisational-group /University of Technology Sydney
pubs.organisational-group /University of Technology Sydney/Faculty of Science
pubs.organisational-group /University of Technology Sydney/Strength - Materials and Technology for Energy Efficiency
utslib.copyright.status Closed Access
utslib.copyright.date 2015-04-15 12:17:09.805752+10
pubs.consider-herdc true
utslib.collection.history Closed (ID: 3)


Files in this item

This item appears in the following Collection(s)

Show simple item record