SEM characterisation of nanodevices and nanomaterials

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Conference Proceeding
Proceedings of the 2006 International Conference on Nanosacience and Nanotechnology, 2006, pp. 596 - 599
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The scanning electron microsope (SEM) cna be used to study and characterise a wide variety of materials used in nanoelectronic and photonic applications. Several different techniques make use of this versatile tool. These include voltage conrtast in secondary electron imaging, charge colletion for semiconductor samples and cathodoluminescnece. These techniques are important in device nanofabrication process development and nanomaterials characterisation.
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