SEM characterization of nanodevices and nanomaterials

Publication Type:
Conference Proceeding
Citation:
Proceedings of the 2006 International Conference on Nanoscience and Nanotechnology, ICONN, 2006, pp. 596 - 599
Issue Date:
2006-12-01
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The scanning electron microscope (SEM) can be used to study and characterize a wide variety of materials used in nanoelectronic and photonic applications. Several different techniques make use of this versatile tool. These include voltage contrast in secondary electron imaging, charge collection for semiconductor samples and cathodoluminescence. These techniques are important in device nanofabrication process development and nanomaterials characterization. © 2006 IEEE.
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