Gas-mediated electron beam induced etching - From fundamental physics to device fabrication

Publication Type:
Journal Article
Microscopy and Microanalysis, 2014, 20 (3), pp. 364 - 365
Issue Date:
Filename Description Size
Gas-Mediated Electron Beam Induced Etching – From Fundamental Physics to.pdfPublished Version2.51 MB
Adobe PDF
Full metadata record
Please use this identifier to cite or link to this item: