Gas-mediated electron beam induced etching - From fundamental physics to device fabrication

Martin, AA; Aharonovich, I; Toth, M

Gas-mediated electron beam induced etching - From fundamental physics to device fabrication

Martin, AA Aharonovich, I

Toth, M

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Publication Type:: Journal Article
Citation:: Microscopy and Microanalysis, 2014, 20 (3), pp. 364 - 365
Issue Date:: 2014-01-01

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Full metadata record

Field	Value	Language
dc.contributor.author	Martin, AA	en_US
dc.contributor.author	Aharonovich, I https://orcid.org/0000-0003-4304-3935	en_US
dc.contributor.author	Toth, M https://orcid.org/0000-0003-1564-4899	en_US
dc.date.issued	2014-01-01	en_US
dc.identifier.citation	Microscopy and Microanalysis, 2014, 20 (3), pp. 364 - 365	en_US
dc.identifier.issn	1431-9276	en_US
dc.identifier.uri	http://hdl.handle.net/10453/115852
dc.relation.ispartof	Microscopy and Microanalysis	en_US
dc.relation.isbasedon	10.1017/S1431927614003547	en_US
dc.subject.classification	Microscopy	en_US
dc.title	Gas-mediated electron beam induced etching - From fundamental physics to device fabrication	en_US
dc.type	Journal Article
utslib.citation.volume	3	en_US
utslib.citation.volume	20	en_US
utslib.for	0204 Condensed Matter Physics	en_US
utslib.for	0912 Materials Engineering	en_US
utslib.for	0601 Biochemistry and Cell Biology	en_US
pubs.embargo.period	Not known	en_US
pubs.organisational-group	/University of Technology Sydney
pubs.organisational-group	/University of Technology Sydney/Faculty of Science
pubs.organisational-group	/University of Technology Sydney/Faculty of Science/School of Mathematical and Physical Sciences
pubs.organisational-group	/University of Technology Sydney/Strength - IBMD - Initiative for Biomedical Devices
pubs.organisational-group	/University of Technology Sydney/Strength - MTEE - Research Centre Materials and Technology for Energy Efficiency
utslib.copyright.status	closed_access
pubs.issue	3	en_US
pubs.publication-status	Published	en_US
pubs.volume	20	en_US

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http://hdl.handle.net/10453/115852