Characterisation of atomic layer deposition using x-ray reflectometry

Windover, D; Armstrong, NG; Cline, JP; Hung, PY; Diebold, A

Characterisation of atomic layer deposition using x-ray reflectometry

Windover, D Armstrong, NG Cline, JP Hung, PY Diebold, A

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Publisher:: American Institute of Physics
Publication Type:: Conference Proceeding
Citation:: Characterisation and metrology for ULSI Technollogy 2005, 2005, pp. 161 - 165
Issue Date:: 2005-01

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Field	Value	Language
dc.contributor.author	Windover, D	en_US
dc.contributor.author	Armstrong, NG	en_US
dc.contributor.author	Cline, JP	en_US
dc.contributor.author	Hung, PY	en_US
dc.contributor.author	Diebold, A	en_US
dc.contributor.editor	Seiler, DG	en_US
dc.contributor.editor	Diebold, AC	en_US
dc.contributor.editor	McDonald, R	en_US
dc.contributor.editor	Ayre, CR	en_US
dc.contributor.editor	Khosla, RP	en_US
dc.contributor.editor	Zollner, S	en_US
dc.contributor.editor	Secula, EM	en_US
dc.date	2005-03-15	en_US
dc.date.issued	2005-01	en_US
dc.identifier.citation	Characterisation and metrology for ULSI Technollogy 2005, 2005, pp. 161 - 165	en_US
dc.identifier.isbn	0-7354-0277-9	en_US
dc.identifier.uri	http://hdl.handle.net/10453/1700
dc.publisher	American Institute of Physics	en_US
dc.relation.ispartof	Characterisation and metrology for ULSI Technollogy 2005	en_US
dc.relation.ispartof	Characterisation and Metrology for ULSI Technology	en_US
dc.relation.isbasedon	https://aip.scitation.org/doi/10.1063/1.2062956	en_US
dc.rights	The following article has been submitted to/accepted by Characterisation and Metrology for ULSI Technology. After it is published, it will be found at https://aip.scitation.org/doi/10.1063/1.2062956 .	en_US
dc.rights	The following article has been submitted to/accepted by Characterisation and metrology for ULSI Technollogy 2005. After it is published, it will be found at https://aip.scitation.org/doi/10.1063/1.2062956 .	en_US
dc.title	Characterisation of atomic layer deposition using x-ray reflectometry	en_US
dc.type	Conference Proceeding
utslib.location	New York, USA	en_US
utslib.location.activity	New York, USA	en_US
utslib.for	0204 Condensed Matter Physics	en_US
dc.location.activity	New York, USA	en_US
pubs.embargo.period	Not known	en_US
pubs.organisational-group	/University of Technology Sydney
pubs.organisational-group	/University of Technology Sydney/Faculty of Science
utslib.copyright.status	closed_access
pubs.consider-herdc	true	en_US
pubs.place-of-publication	New York, USA	en_US
pubs.start-date	2005-03-15	en_US

Please use this identifier to cite or link to this item:

http://hdl.handle.net/10453/1700