Characterisation of atomic layer deposition using x-ray reflectometry

Publisher:
American Institute of Physics
Publication Type:
Conference Proceeding
Citation:
Characterisation and metrology for ULSI Technollogy 2005, 2005, pp. 161 - 165
Issue Date:
2005-01
Full metadata record
Files in This Item:
Filename Description Size
Thumbnail2005002939.pdf581.88 kB
Adobe PDF
Please use this identifier to cite or link to this item: