Depletion Layer Imaging Using A Gaseous Secondary Electron Detector In An Environmental Scanning Electron Microscope

Amer Inst Physics
Publication Type:
Journal Article
Applied Physics Letters, 1999, 75 (1), pp. 76 - 78
Issue Date:
Full metadata record
Files in This Item:
Filename Description Size
Thumbnail2006013343OK.pdf394.64 kB
Adobe PDF
We present a method for imaging depletion layers using the gaseous secondary electron detector (GSED) employed in environmental scanning electron microscopes. GSED images of a p-n junction were obtained from a Si P+PN power diode. Behavior of the junctio
Please use this identifier to cite or link to this item: