Fabrication of thin diamond membranes for photonic applications
- Publication Type:
- Journal Article
- Diamond and Related Materials, 2013, 33 pp. 45 - 48
- Issue Date:
High quality, thin diamond membranes containing nitrogen-vacancy centers provide critical advantages in the fabrication of diamond-based structures for a variety of applications, including wide field magnetometry, photonics and biosensing. In this work we describe, in detail, the generation of thin, optically-active diamond membranes by means of ion implantation and overgrowth. To establish the suitability of our method for photonic applications, photonic crystal cavities with quality factor of 1000 are fabricated. © 2012 Elsevier B.V.
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