Imaging Deep Trap Distributions By Low Vacuum Scanning Electron Microscopy

Amer Inst Physics
Publication Type:
Journal Article
Applied Physics Letters, 2007, 90 (7), pp. 0 - 0
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The distribution of deep traps in a bulk dielectric (Al2O3) is imaged by low vacuum scanning electron microscopy (LVSEM). The image contrast corresponds to spatial variations in radiation-induced, field-enhanced conductivity. A methodology is presented f
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