A nanoindentation study of magnetron co-sputtered nanocrystalline ternary nitride coatings

International Institute for Science Sintering
Publication Type:
Journal Article
Science of Sintering, 2006, 38 (3), pp. 211 - 221
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Nanoindentation testing was used to determine the hardness, elastic modulus and plasticity parameter of three newly developed ternary nitride coatings with nano-sized grains. With decreasing nitrogen deposition pressure, grain diameter of the coatings decreases that leads to both higher nanohardness and elastic modulus with conservation of satisfactory values of plasticity characteristic.
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