Growth and characterisation of birefringent films on textured silicon substrates

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Journal Article
Microelectronic Engineering, 2005, 78-79 (1-4), pp. 436 - 441
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The effects of textured substrates on the serial bi-deposition (SBD) technique of thin film growth have been investigated. Obliquely deposited coatings exhibit optical anisotropy as a consequence of the internal nanostructure developed during self-shadowed growth, which should be enhanced by growth onto textured substrates. We examine the growth and some subsequent optical properties of SBD coatings deposited obliquely onto lithographically- defined fine line and dot arrays with periods as small as 100 nm. Reflection retardance optical measurements show clear differences over a range of wavelengths for the structures in the patterned areas. © 2005 Elsevier B.V. All rights reserved.
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