Growth and characterisation of birefringent films on textured silicon substrates

Publisher:
Elsevier
Publication Type:
Journal Article
Citation:
Microelectronic Engineering, 2005, 78-79 pp. 436 - 441
Issue Date:
2005-01
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The effects of textured substrates on the serial bi-deposition (SBD) technique of thin film growth have been investigated. Obliquely deposited coatings exhibit optical anisotropy as a consequence of the internal nanostructure developed during self-shadowed growth, which should be enhanced by growth onto textured substrates. We examine the growth and some subsequent optical properties of SBD coatings deposited obliquely onto lithographically-defined fine line and dot arrays with periods as small as 100 nm. Reflection retardance optical measurements show clear differences over a range of wavelengths for the structures in the patterned areas.
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