Browsing byAuthorCvelbar, U
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Issue Date | Title | Author(s) |
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2017-02-15 | TiN deposition and morphology control by scalable plasma-assisted surface treatments | Baranov, O; Fang, J; Ostrikov, K; Cvelbar, U |
Issue Date | Title | Author(s) |
---|---|---|
2017-02-15 | TiN deposition and morphology control by scalable plasma-assisted surface treatments | Baranov, O; Fang, J; Ostrikov, K; Cvelbar, U |