Mechanical and electromechanical properties of graphene and their potential application in MEMS

Khan, ZH; Kermany, AR; Öchsner, A; Iacopi, F

Mechanical and electromechanical properties of graphene and their potential application in MEMS

Khan, ZH Kermany, AR Öchsner, A Iacopi, F

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Publication Type:: Journal Article
Citation:: Journal of Physics D: Applied Physics, 2017, 50 (5)
Issue Date:: 2017-01-06

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Field	Value	Language
dc.contributor.author	Khan, ZH	en_US
dc.contributor.author	Kermany, AR	en_US
dc.contributor.author	Öchsner, A	en_US
dc.contributor.author	Iacopi, F https://orcid.org/0000-0002-3196-0990	en_US
dc.date.issued	2017-01-06	en_US
dc.identifier.citation	Journal of Physics D: Applied Physics, 2017, 50 (5)	en_US
dc.identifier.issn	0022-3727	en_US
dc.identifier.uri	http://hdl.handle.net/10453/125315
dc.description.abstract	© 2017 IOP Publishing Ltd. Graphene-based micro-electromechanical systems (MEMS) are very promising candidates for next generation miniaturized, lightweight, and ultra-sensitive devices. In this review, we review the progress to date of the assessment of the mechanical, electromechanical, and thermomechanical properties of graphene for application in graphene-based MEMS. Graphene possesses a plethora of outstanding properties - such as a 1 TPa Young's modulus, exceptionally high 2D failure strength that stems from its sp2 hybridization, and strong sigma bonding between carbon atoms. Such exceptional mechanical properties can enable, for example, graphene-based sound sources capable of generating sound beyond the audible range. The recently engineered piezoelectric properties of atomic force microscope tip-pressed graphene membranes or supported graphene on SiO2 substrates, have paved the way in fabricating graphene-based nano-generators and actuators. On the other hand, graphene's piezoresistive properties have enabled miniaturized pressure and strain sensors. 2D graphene nano-mechanical resonators can potentially measure ultralow forces, charges and potentially detect single atomic masses. The exceptional tribology of graphene can play a significant role in achieving superlubricity. In addition, the highest reported thermal conductivity of graphene is amenable for use in chips and providing better performing MEMS, as heat is efficiently dissipated. On top of that, graphene membranes could be nano-perforated to realize specialized applications like DNA translocation and desalination. Finally, to ensure stability and reliability of the graphene-based MEMS, adhesion is an important mechanical property that should be considered. In general, graphene could be used as a structural material in resonators, sensors, actuators and nano-generators with better performance and sensitivity than conventional MEMS.	en_US
dc.relation.ispartof	Journal of Physics D: Applied Physics	en_US
dc.relation.isbasedon	10.1088/1361-6463/50/5/053003	en_US
dc.rights	info:eu-repo/semantics/openAccess
dc.subject.classification	Applied Physics	en_US
dc.title	Mechanical and electromechanical properties of graphene and their potential application in MEMS	en_US
dc.type	Journal Article
utslib.citation.volume	5	en_US
utslib.citation.volume	50	en_US
utslib.for	0912 Materials Engineering	en_US
utslib.for	02 Physical Sciences	en_US
utslib.for	09 Engineering	en_US
pubs.embargo.period	Not known	en_US
pubs.organisational-group	/University of Technology Sydney
pubs.organisational-group	/University of Technology Sydney/Faculty of Engineering and Information Technology
pubs.organisational-group	/University of Technology Sydney/Faculty of Engineering and Information Technology/School of Electrical and Data Engineering
utslib.copyright.status	open_access	*
pubs.issue	5	en_US
pubs.publication-status	Published	en_US
pubs.volume	50	en_US

Abstract:

© 2017 IOP Publishing Ltd. Graphene-based micro-electromechanical systems (MEMS) are very promising candidates for next generation miniaturized, lightweight, and ultra-sensitive devices. In this review, we review the progress to date of the assessment of the mechanical, electromechanical, and thermomechanical properties of graphene for application in graphene-based MEMS. Graphene possesses a plethora of outstanding properties - such as a 1 TPa Young's modulus, exceptionally high 2D failure strength that stems from its sp2 hybridization, and strong sigma bonding between carbon atoms. Such exceptional mechanical properties can enable, for example, graphene-based sound sources capable of generating sound beyond the audible range. The recently engineered piezoelectric properties of atomic force microscope tip-pressed graphene membranes or supported graphene on SiO2 substrates, have paved the way in fabricating graphene-based nano-generators and actuators. On the other hand, graphene's piezoresistive properties have enabled miniaturized pressure and strain sensors. 2D graphene nano-mechanical resonators can potentially measure ultralow forces, charges and potentially detect single atomic masses. The exceptional tribology of graphene can play a significant role in achieving superlubricity. In addition, the highest reported thermal conductivity of graphene is amenable for use in chips and providing better performing MEMS, as heat is efficiently dissipated. On top of that, graphene membranes could be nano-perforated to realize specialized applications like DNA translocation and desalination. Finally, to ensure stability and reliability of the graphene-based MEMS, adhesion is an important mechanical property that should be considered. In general, graphene could be used as a structural material in resonators, sensors, actuators and nano-generators with better performance and sensitivity than conventional MEMS.

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http://hdl.handle.net/10453/125315