Long lifecycle MEMS double-clamped beam based on low stress graphene compound film

Zhang, T; Bao, JF; Zeng, RZ; Yang, Y; Bao, LL; Bao, FH; Zhang, Y; Qin, F

Long lifecycle MEMS double-clamped beam based on low stress graphene compound film

Zhang, T Bao, JF Zeng, RZ Yang, Y

Bao, LL Bao, FH Zhang, Y Qin, F

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Publication Type:: Journal Article
Citation:: Sensors and Actuators, A: Physical, 2019, 288 pp. 39 - 46
Issue Date:: 2019-04-01

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Field	Value	Language
dc.contributor.author	Zhang, T	en_US
dc.contributor.author	Bao, JF	en_US
dc.contributor.author	Zeng, RZ	en_US
dc.contributor.author	Yang, Y https://orcid.org/0000-0001-7439-2156	en_US
dc.contributor.author	Bao, LL	en_US
dc.contributor.author	Bao, FH	en_US
dc.contributor.author	Zhang, Y	en_US
dc.contributor.author	Qin, F	en_US
dc.date.accessioned	2020-04-19T21:26:54Z
dc.date.available	2020-04-19T21:26:54Z
dc.date.issued	2019-04-01	en_US
dc.identifier.citation	Sensors and Actuators, A: Physical, 2019, 288 pp. 39 - 46	en_US
dc.identifier.issn	0924-4247	en_US
dc.identifier.uri	http://hdl.handle.net/10453/140091
dc.description.abstract	© 2019 Elsevier B.V. Graphene based three-layer compound film on the silicon substrate is formed by gold deposition of electron beam evaporation (EBE) and graphene transfer. Processed with different high temperature annealing in nitrogen, the film with residual tensile stress of 52.58 MPa at 500 ℃ can be achieved by using an X-ray diffraction (XRD) method. Based on this low stress film, a series of long lifecycle MEMS double-clamped beams (DCBs) are fabricated by the standard MEMS manufacturing technology. The achieved beam can be turned on/off for up to 100 million times at the pull-in voltage of 30 V, which is compatible with the conventional, complementary metal-oxide-semiconductor (CMOS) circuit requirements.	en_US
dc.relation.ispartof	Sensors and Actuators, A: Physical	en_US
dc.relation.isbasedon	10.1016/j.sna.2019.01.010	en_US
dc.rights	info:eu-repo/semantics/closedAccess
dc.subject.classification	Nanoscience & Nanotechnology	en_US
dc.title	Long lifecycle MEMS double-clamped beam based on low stress graphene compound film	en_US
dc.type	Journal Article
utslib.citation.volume	288	en_US
utslib.for	0906 Electrical and Electronic Engineering	en_US
utslib.for	0912 Materials Engineering	en_US
utslib.for	0913 Mechanical Engineering	en_US
pubs.embargo.period	Not known	en_US
pubs.organisational-group	/University of Technology Sydney
pubs.organisational-group	/University of Technology Sydney/Faculty of Engineering and Information Technology
pubs.organisational-group	/University of Technology Sydney/Faculty of Engineering and Information Technology/School of Electrical and Data Engineering
utslib.copyright.status	closed_access	*
pubs.publication-status	Published	en_US
pubs.volume	288	en_US

Abstract:

© 2019 Elsevier B.V. Graphene based three-layer compound film on the silicon substrate is formed by gold deposition of electron beam evaporation (EBE) and graphene transfer. Processed with different high temperature annealing in nitrogen, the film with residual tensile stress of 52.58 MPa at 500 ℃ can be achieved by using an X-ray diffraction (XRD) method. Based on this low stress film, a series of long lifecycle MEMS double-clamped beams (DCBs) are fabricated by the standard MEMS manufacturing technology. The achieved beam can be turned on/off for up to 100 million times at the pull-in voltage of 30 V, which is compatible with the conventional, complementary metal-oxide-semiconductor (CMOS) circuit requirements.

Please use this identifier to cite or link to this item:

http://hdl.handle.net/10453/140091