Design, modeling and parametric analysis of Chevron shaped electrothermal actuator using low cost metalMUMPS fabrication process

Saqib, M; Saleem, MM; Awan, SU; Rehman, MU

Design, modeling and parametric analysis of Chevron shaped electrothermal actuator using low cost metalMUMPS fabrication process

Saqib, M

Saleem, MM Awan, SU Rehman, MU

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Publisher:: IEEE
Publication Type:: Conference Proceeding
Citation:: 2018 International Conference on Computing, Electronic and Electrical Engineering, ICE Cube 2018, 2019
Issue Date:: 2019-01-11

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Field	Value	Language
dc.contributor.author	Saqib, M https://orcid.org/0000-0003-4374-0888
dc.contributor.author	Saleem, MM
dc.contributor.author	Awan, SU
dc.contributor.author	Rehman, MU
dc.date	2019-11-12
dc.date.accessioned	2020-06-13T01:09:46Z
dc.date.available	2020-06-13T01:09:46Z
dc.date.issued	2019-01-11
dc.identifier.citation	2018 International Conference on Computing, Electronic and Electrical Engineering, ICE Cube 2018, 2019
dc.identifier.isbn	9781538679395
dc.identifier.uri	http://hdl.handle.net/10453/141402
dc.description.abstract	© 2018 IEEE. High force and large displacement at the low actuation voltage is the primary concern for the micro actuators to be used for microelectromechanical systems (MEMS) based devices. The electrothermal actuators are distinctive in terms of providing large output displacement and force generation at reasonably low actuation voltages. This paper presents the design, modeling and parametric study of the chevron-shaped electrothermal actuator designed by following the design rules of commercially available low cost MetalMUMPS fabrication process. The material properties of electroplated Nickel are used for the finite element method (FEM) based simulations. The behavior of Chevron-shaped electrothermal actuator for the significant parametric variations is also observed. The proposed chevron-shaped electrothermal actuator achieve the output displacement of 57.602 μm along with 313.11 μN force at the low actuation voltage of 0.2 V.
dc.language	en
dc.publisher	IEEE
dc.relation.ispartof	2018 International Conference on Computing, Electronic and Electrical Engineering, ICE Cube 2018
dc.relation.ispartof	International Conference on Computing, Electronic and Electrical Engineering
dc.relation.isbasedon	10.1109/ICECUBE.2018.8610992
dc.rights	© 2019 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.	en_US
dc.rights	info:eu-repo/semantics/closedAccess
dc.title	Design, modeling and parametric analysis of Chevron shaped electrothermal actuator using low cost metalMUMPS fabrication process
dc.type	Conference Proceeding
utslib.location.activity	Quetta, Pakistan
pubs.organisational-group	/University of Technology Sydney/Faculty of Engineering and Information Technology
pubs.organisational-group	/University of Technology Sydney/Faculty of Engineering and Information Technology/School of Computer Science
pubs.organisational-group	/University of Technology Sydney
utslib.copyright.status	closed_access	*
pubs.consider-herdc	false
dc.date.updated	2020-06-13T01:09:44Z
pubs.finish-date	2019-11-13
pubs.place-of-publication	Piscataway, USA
pubs.publication-status	Published
pubs.start-date	2019-11-12
dc.location	Piscataway, USA

Abstract:

© 2018 IEEE. High force and large displacement at the low actuation voltage is the primary concern for the micro actuators to be used for microelectromechanical systems (MEMS) based devices. The electrothermal actuators are distinctive in terms of providing large output displacement and force generation at reasonably low actuation voltages. This paper presents the design, modeling and parametric study of the chevron-shaped electrothermal actuator designed by following the design rules of commercially available low cost MetalMUMPS fabrication process. The material properties of electroplated Nickel are used for the finite element method (FEM) based simulations. The behavior of Chevron-shaped electrothermal actuator for the significant parametric variations is also observed. The proposed chevron-shaped electrothermal actuator achieve the output displacement of 57.602 μm along with 313.11 μN force at the low actuation voltage of 0.2 V.

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http://hdl.handle.net/10453/141402