Heterogeneous Integrated MEMS Inertial Switch with Electrostatic Locking and Compliant Cantilever Stationary Electrode for Holding Stable ‘on’-State
- Publisher:
- IEEE
- Publication Type:
- Conference Proceeding
- Citation:
- 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS), 2019
- Issue Date:
- 2019-01
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Filename | Description | Size | |||
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08870812.pdf | Published version | 2.13 MB |
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