Heterogeneous Integrated MEMS Inertial Switch with Electrostatic Locking and Compliant Cantilever Stationary Electrode for Holding Stable ‘on’-State

Zhang, X; Shi, J; Zhu, X; Wang, Y; Chen, J; Ding, G; Yang, Z

Heterogeneous Integrated MEMS Inertial Switch with Electrostatic Locking and Compliant Cantilever Stationary Electrode for Holding Stable ‘on’-State

Zhang, X Shi, J Zhu, X

Wang, Y Chen, J Ding, G Yang, Z

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Publisher:: IEEE
Publication Type:: Conference Proceeding
Citation:: 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS), 2019
Issue Date:: 2019-01

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Field	Value	Language
dc.contributor.author	Zhang, X
dc.contributor.author	Shi, J
dc.contributor.author	Zhu, X https://orcid.org/0000-0002-5814-394X
dc.contributor.author	Wang, Y
dc.contributor.author	Chen, J
dc.contributor.author	Ding, G
dc.contributor.author	Yang, Z
dc.date	2019-01-27
dc.date.accessioned	2020-06-30T04:54:27Z
dc.date.available	2020-06-30T04:54:27Z
dc.date.issued	2019-01
dc.identifier.citation	2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS), 2019
dc.identifier.uri	http://hdl.handle.net/10453/141698
dc.language	en
dc.publisher	IEEE
dc.relation.ispartof	2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS)
dc.relation.ispartof	2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS)
dc.relation.isbasedon	10.1109/memsys.2019.8870812
dc.rights	© 2019 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.	en_US
dc.rights	info:eu-repo/semantics/closedAccess
dc.title	Heterogeneous Integrated MEMS Inertial Switch with Electrostatic Locking and Compliant Cantilever Stationary Electrode for Holding Stable ‘on’-State
dc.type	Conference Proceeding
pubs.organisational-group	/University of Technology Sydney/Faculty of Engineering and Information Technology
pubs.organisational-group	/University of Technology Sydney/Strength - GBDTC - Global Big Data Technologies
pubs.organisational-group	/University of Technology Sydney/Faculty of Engineering and Information Technology/School of Electrical and Data Engineering
pubs.organisational-group	/University of Technology Sydney
utslib.copyright.status	closed_access	*
dc.date.updated	2020-06-30T04:54:23Z
pubs.finish-date	2019-01-31
pubs.publication-status	Published
pubs.start-date	2019-01-27

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