Evolution of the nanostructure of deposits grown by electron beam induced deposition

Publisher:
Amer Inst Physics
Publication Type:
Journal article
Citation:
Li J T et al. 2008, 'Evolution of the nanostructure of deposits grown by electron beam induced deposition', Amer Inst Physics, vol. 93, no. 2, pp. 023130-1-023130-3.
Issue Date:
2008
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Environmental scanning electron microscopy (ESEM) was used to perform electron beam induced deposition (EBID) using a WF(6) precursor. The deposits consist of WO(3) nanocrystals embedded in an amorphous matrix. Oxide formation is attributed to residual oxidizers present in the ESEM chamber during EBID. Under conditions of fixed low electron flux, the WO(3) grain size and the degree of deposit crystallinity increase with time. These changes correlate with the degree of electron energy deposition into the material during growth, indicating that electron beam induced modification of as-grown material is significant in controlling the nanostructure and functionality of materials fabricated by EBID.
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