Evolution of the nanostructure of deposits grown by electron beam induced deposition

Li, JT; Toth, M; Tileli, V; Dunn, KA; Lobo, C; Thiel, B

Evolution of the nanostructure of deposits grown by electron beam induced deposition

Li, JT Toth, M Tileli, V Dunn, KA Lobo, C Thiel, B

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Publisher:: Amer Inst Physics
Publication Type:: Journal Article
Citation:: Li J T et al. 2008, 'Evolution of the nanostructure of deposits grown by electron beam induced deposition', Amer Inst Physics, vol. 93, no. 2, pp. 023130-1-023130-3.
Issue Date:: 2008

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Field	Value	Language
dc.contributor.author	Li, JT	en_US
dc.contributor.author	Toth, M	en_US
dc.contributor.author	Tileli, V	en_US
dc.contributor.author	Dunn, KA	en_US
dc.contributor.author	Lobo, C	en_US
dc.contributor.author	Thiel, B	en_US
dc.date.accessioned	2012-02-02T04:42:01Z
dc.date.available	2012-02-02T04:42:01Z
dc.date.issued	2008	en_US
dc.identifier	2010004246	en_US
dc.identifier.citation	Li J T et al. 2008, 'Evolution of the nanostructure of deposits grown by electron beam induced deposition', Amer Inst Physics, vol. 93, no. 2, pp. 023130-1-023130-3.	en_US
dc.identifier.issn	0003-6951	en_US
dc.identifier.other	C1UNSUBMIT	en_US
dc.identifier.uri	http://hdl.handle.net/10453/14557
dc.description.abstract	Environmental scanning electron microscopy (ESEM) was used to perform electron beam induced deposition (EBID) using a WF(6) precursor. The deposits consist of WO(3) nanocrystals embedded in an amorphous matrix. Oxide formation is attributed to residual oxidizers present in the ESEM chamber during EBID. Under conditions of fixed low electron flux, the WO(3) grain size and the degree of deposit crystallinity increase with time. These changes correlate with the degree of electron energy deposition into the material during growth, indicating that electron beam induced modification of as-grown material is significant in controlling the nanostructure and functionality of materials fabricated by EBID.	en_US
dc.publisher	Amer Inst Physics	en_US
dc.relation.ispartof	Applied Physics Letters	en_US
dc.relation.ispartof	Verified OK	en_US
dc.relation.isbasedon	http://dx.doi.org/10.1063/1.2959112	en_US
dc.subject	Chemical-Vapor-Deposition; Monte-Carlo; Fabrication; Microscopy; Wires	en_US
dc.subject.classification	Condensed Matter Physics	en_US
dc.title	Evolution of the nanostructure of deposits grown by electron beam induced deposition	en_US
dc.type	Journal article
utslib.citation.volume	93	en_US
utslib.citation.number	2	en_US
utslib.location	Melville	en_US
utslib.citation.startpage	023130-1	en_US
utslib.citation.endpage	023130-3	en_US
utslib.identifier.org	SCI.Faculty of Science	en_US
utslib.for	020400	en_US
utslib.percentage	100	en_US
dc.location.activity	WOS:000257796100107	en_US
utslib.copyright.status	closed_access

Abstract:

Environmental scanning electron microscopy (ESEM) was used to perform electron beam induced deposition (EBID) using a WF(6) precursor. The deposits consist of WO(3) nanocrystals embedded in an amorphous matrix. Oxide formation is attributed to residual oxidizers present in the ESEM chamber during EBID. Under conditions of fixed low electron flux, the WO(3) grain size and the degree of deposit crystallinity increase with time. These changes correlate with the degree of electron energy deposition into the material during growth, indicating that electron beam induced modification of as-grown material is significant in controlling the nanostructure and functionality of materials fabricated by EBID.

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http://hdl.handle.net/10453/14557