A critical review on challenges and trend of ultrapure water production process.

Zhang, X; Yang, Y; Ngo, HH; Guo, W; Wen, H; Wang, X; Zhang, J; Long, T

A critical review on challenges and trend of ultrapure water production process.

Zhang, X Yang, Y Ngo, HH Guo, W

Wen, H Wang, X Zhang, J Long, T

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Publisher:: Elsevier BV
Publication Type:: Journal Article
Citation:: The Science of the total environment, 2021, 785, pp. 147254
Issue Date:: 2021-09

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Field	Value	Language
dc.contributor.author	Zhang, X
dc.contributor.author	Yang, Y
dc.contributor.author	Ngo, HH
dc.contributor.author	Guo, W https://orcid.org/0000-0001-5542-2858
dc.contributor.author	Wen, H
dc.contributor.author	Wang, X
dc.contributor.author	Zhang, J
dc.contributor.author	Long, T
dc.date.accessioned	2021-06-23T06:15:30Z
dc.date.available	2021-04-16
dc.date.available	2021-06-23T06:15:30Z
dc.date.issued	2021-09
dc.identifier.citation	The Science of the total environment, 2021, 785, pp. 147254
dc.identifier.issn	0048-9697
dc.identifier.issn	1879-1026
dc.identifier.uri	http://hdl.handle.net/10453/149729
dc.description.abstract	The recent and vigorous developments in semiconductor technology strictly request better quality and large quantity of ultrapure water (UPW) for their production. It is crucial to secure a large amount of raw water for the future development of UPW production. Using reclaimed water as alternative raw water source to produce UPW is therefore considered the feasible trend and solution for sustainable use of water resources towards a common future practice in UPW production. The challenge of using reclaimed water is due to its higher content of organic pollutants, especially small molecule organic pollutants such as urea, which are difficult to remove through traditional UPW production process. Consequently, improving the existing UPW production process to meet the water standard desired in the semiconductor industry is essential. This paper reviewed the current traditional processes for removing organic matters in UPW production, including ion-exchange (IX) adsorption, granular activated carbon (GAC) adsorption, reverse osmosis (RO) and ultraviolet (UV) irradiation. The potential problems in the actual UPW production process were identified when using reclaimed water as raw water source. A new strategy of applying the advanced oxidation process (AOPs) to UPW production as a supplementary unit to guarantee UPW quality was proposed. Its feasibility and research focus were then analyzed and discussed in obtaining a new solution for a future development of the UPW production process.
dc.format	Print-Electronic
dc.language	eng
dc.publisher	Elsevier BV
dc.relation.ispartof	The Science of the total environment
dc.relation.isbasedon	10.1016/j.scitotenv.2021.147254
dc.rights	info:eu-repo/semantics/embargoedAccess
dc.subject.classification	Environmental Sciences
dc.title	A critical review on challenges and trend of ultrapure water production process.
dc.type	Journal Article
utslib.citation.volume	785
utslib.location.activity	Netherlands
pubs.organisational-group	/University of Technology Sydney
pubs.organisational-group	/University of Technology Sydney/Faculty of Engineering and Information Technology
pubs.organisational-group	/University of Technology Sydney/Faculty of Engineering and Information Technology/School of Civil and Environmental Engineering
pubs.organisational-group	/University of Technology Sydney/Strength - CTWW - Centre for Technology in Water and Wastewater Treatment
utslib.copyright.status	open_access	*
utslib.copyright.embargo	2023-09-01T00:00:00+1000Z
dc.date.updated	2021-06-23T06:15:28Z
pubs.publication-status	Accepted
pubs.volume	785

Abstract:

The recent and vigorous developments in semiconductor technology strictly request better quality and large quantity of ultrapure water (UPW) for their production. It is crucial to secure a large amount of raw water for the future development of UPW production. Using reclaimed water as alternative raw water source to produce UPW is therefore considered the feasible trend and solution for sustainable use of water resources towards a common future practice in UPW production. The challenge of using reclaimed water is due to its higher content of organic pollutants, especially small molecule organic pollutants such as urea, which are difficult to remove through traditional UPW production process. Consequently, improving the existing UPW production process to meet the water standard desired in the semiconductor industry is essential. This paper reviewed the current traditional processes for removing organic matters in UPW production, including ion-exchange (IX) adsorption, granular activated carbon (GAC) adsorption, reverse osmosis (RO) and ultraviolet (UV) irradiation. The potential problems in the actual UPW production process were identified when using reclaimed water as raw water source. A new strategy of applying the advanced oxidation process (AOPs) to UPW production as a supplementary unit to guarantee UPW quality was proposed. Its feasibility and research focus were then analyzed and discussed in obtaining a new solution for a future development of the UPW production process.

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