Piezoelectric benders with strain sensing electrodes: Sensor design for position control and force estimation
- Publisher:
- Elsevier
- Publication Type:
- Journal Article
- Citation:
- Sensors and Actuators A: Physical, 2022, 335, pp. 113384
- Issue Date:
- 2022-03-01
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| Filename | Description | Size | |||
|---|---|---|---|---|---|
| 1-s2.0-S092442472200022X-main.pdf | 1.21 MB |
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Piezoelectric benders are widely used in industrial applications due to their low-cost and compact size. However, due to the large relative size and cost of displacement sensors, bender actuators are often operated in open-loop or with feed-forward control, which can limit positioning accuracy to 20% of full-scale. To improve the positioning accuracy of piezoelectric benders, this article proposes integrating resistive strain gauges into the electrode surface by chemical etching or laser ablation. These strain sensors are then used to measure and control the tip displacement. The proposed sensors are shown to suffer from significant cross-coupling between the actuator voltage and measured signal; however, this can be mitigated by judicious choice of the sensor location and actuator driving scheme. In addition to position sensing, a method is also presented for simultaneous estimation of the contact force between the actuator tip and load. The proposed methods are validated experimentally by controlling the tip position of a piezoelectric bender while simultaneously estimating the force applied to a reference load cell.
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