Simultaneous tip force and displacement sensing for AFM cantilevers with on-chip actuation: Design and characterization for off-resonance tapping mode

Bem, NFSD; Ruppert, MG; Fleming, AJ; Yong, YK

Simultaneous tip force and displacement sensing for AFM cantilevers with on-chip actuation: Design and characterization for off-resonance tapping mode

Bem, NFSD Ruppert, MG Fleming, AJ Yong, YK

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Publisher:: Elsevier
Publication Type:: Journal Article
Citation:: Sensors and Actuators A: Physical, 2022, 338, pp. 113496
Issue Date:: 2022-05-01

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Field	Value	Language
dc.contributor.author	Bem, NFSD
dc.contributor.author	Ruppert, MG
dc.contributor.author	Fleming, AJ
dc.contributor.author	Yong, YK
dc.date.accessioned	2023-04-06T01:12:25Z
dc.date.available	2023-04-06T01:12:25Z
dc.date.issued	2022-05-01
dc.identifier.citation	Sensors and Actuators A: Physical, 2022, 338, pp. 113496
dc.identifier.issn	0924-4247
dc.identifier.uri	http://hdl.handle.net/10453/169234
dc.description.abstract	The use of integrated on-chip actuation simplifies the identification of a cantilever resonance, can improve imaging speed, and enables the use of smaller cantilevers, which is required for low-force imaging at high speed. This article describes a cantilever with on-chip actuation and novel dual-sensing capabilities for AFM. The dual-sensing configuration allows for tip displacement and tip force to be measured simultaneously. A mathematical model is developed and validated with finite element analysis. A physical prototype is presented, and its calibration and validation are presented. The cantilever is optimized for use in off-resonance tapping modes. Experimental results demonstrate an agreement between the on-chip sensors and external force and displacement measurements.
dc.language	en
dc.publisher	Elsevier
dc.relation.ispartof	Sensors and Actuators A: Physical
dc.relation.isbasedon	10.1016/j.sna.2022.113496
dc.rights	info:eu-repo/semantics/closedAccess
dc.subject	0906 Electrical and Electronic Engineering, 0912 Materials Engineering, 0913 Mechanical Engineering
dc.subject.classification	Nanoscience & Nanotechnology
dc.title	Simultaneous tip force and displacement sensing for AFM cantilevers with on-chip actuation: Design and characterization for off-resonance tapping mode
dc.type	Journal Article
utslib.citation.volume	338
utslib.for	0906 Electrical and Electronic Engineering
utslib.for	0912 Materials Engineering
utslib.for	0913 Mechanical Engineering
pubs.organisational-group	/University of Technology Sydney
pubs.organisational-group	/University of Technology Sydney/Faculty of Engineering and Information Technology
utslib.copyright.status	closed_access	*
dc.date.updated	2023-04-06T01:12:23Z
pubs.publication-status	Published
pubs.volume	338

Abstract:

The use of integrated on-chip actuation simplifies the identification of a cantilever resonance, can improve imaging speed, and enables the use of smaller cantilevers, which is required for low-force imaging at high speed. This article describes a cantilever with on-chip actuation and novel dual-sensing capabilities for AFM. The dual-sensing configuration allows for tip displacement and tip force to be measured simultaneously. A mathematical model is developed and validated with finite element analysis. A physical prototype is presented, and its calibration and validation are presented. The cantilever is optimized for use in off-resonance tapping modes. Experimental results demonstrate an agreement between the on-chip sensors and external force and displacement measurements.

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http://hdl.handle.net/10453/169234