Direct synthesis of nanopatterned epitaxial graphene on silicon carbide.
- IOP Publishing
- Publication Type:
- Journal Article
- Nanotechnology, 2023
- Issue Date:
Copyright Clearance Process
- Recently Added
- In Progress
- Open Access
This item is being processed and is not currently available.
The embargo period expires on 3 Jul 2024
This article introduces a straightforward approach for the direct synthesis of transfer-free, nanopatterned epitaxial graphene on silicon carbide on silicon substrates. A catalytic alloy tailored to optimal SiC graphitization is pre-patterned with common lithography and lift-off techniques to form planar graphene structures on top of an unpatterned SiC layer. This method is compatible with both electron-beam lithography and UV-lithography, and graphene gratings down to at least ~100 nm width/space can be realized at the wafer scale. The minimum pitch is limited by the flow of the metal catalyst during the liquid-phase graphitization process. We expect that the current pitch resolution could be further improved by optimizing the metal deposition method and lift-off process. .
Please use this identifier to cite or link to this item: