Nano-Gap Contact MEMS Torsional Mode Acceleration Switch Wake-up Sensor

Koh, Y; Goh, DJ; Ghosh, S; Wong, HX; Sharma, J; Lal, A; Ng, EJ; Lee, JE-Y

Nano-Gap Contact MEMS Torsional Mode Acceleration Switch Wake-up Sensor

Koh, Y Goh, DJ Ghosh, S Wong, HX Sharma, J Lal, A Ng, EJ Lee, JE-Y

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Publisher:: IEEE
Publication Type:: Conference Proceeding
Citation:: 2022 IEEE Sensors, 2022, 2022-October, pp. 1-4
Issue Date:: 2022-12-08

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Full metadata record

Field	Value	Language
dc.contributor.author	Koh, Y
dc.contributor.author	Goh, DJ
dc.contributor.author	Ghosh, S
dc.contributor.author	Wong, HX
dc.contributor.author	Sharma, J
dc.contributor.author	Lal, A
dc.contributor.author	Ng, EJ
dc.contributor.author	Lee, JE-Y
dc.date	2022-10-30
dc.date.accessioned	2023-07-24T00:23:34Z
dc.date.available	2023-07-24T00:23:34Z
dc.date.issued	2022-12-08
dc.identifier.citation	2022 IEEE Sensors, 2022, 2022-October, pp. 1-4
dc.identifier.isbn	978-1-6654-8464-0
dc.identifier.issn	1930-0395
dc.identifier.issn	2168-9229
dc.identifier.uri	http://hdl.handle.net/10453/171627
dc.description.abstract	In this paper a MEMS torsional mode acceleration switch is proposed for the detection of moderately low levels of acceleration The torsional mode structure provides for a large displacement to close a switch with a lower acceleration threshold A nano gap vertical TiN contact was introduced to implement a stable switch contact We demonstrate activation of the acceleration switch by a 15g acceleration input with a contact time that is sufficient to trigger electric circuitry The proposed acceleration switch can be used as a wake up sensor for zero power Internet of Things nodes
dc.language	en
dc.publisher	IEEE
dc.relation.ispartof	2022 IEEE Sensors
dc.relation.ispartof	IEEE Sensors
dc.relation.isbasedon	10.1109/sensors52175.2022.9967063
dc.rights	info:eu-repo/semantics/restrictedAccess
dc.title	Nano-Gap Contact MEMS Torsional Mode Acceleration Switch Wake-up Sensor
dc.type	Conference Proceeding
utslib.citation.volume	2022-October
utslib.location.activity	Dallas, TX, USA
pubs.organisational-group	/University of Technology Sydney
pubs.organisational-group	/University of Technology Sydney/Faculty of Engineering and Information Technology
pubs.organisational-group	/University of Technology Sydney/Faculty of Engineering and Information Technology/School of Electrical and Data Engineering
utslib.copyright.status	in_progress	*
pubs.consider-herdc	false
dc.date.updated	2023-07-24T00:23:32Z
pubs.finish-date	2022-11-02
pubs.place-of-publication	Piscataway, USA
pubs.publication-status	Published
pubs.start-date	2022-10-30
pubs.volume	2022-October
dc.location	Piscataway, USA

Abstract:

In this paper a MEMS torsional mode acceleration switch is proposed for the detection of moderately low levels of acceleration The torsional mode structure provides for a large displacement to close a switch with a lower acceleration threshold A nano gap vertical TiN contact was introduced to implement a stable switch contact We demonstrate activation of the acceleration switch by a 15g acceleration input with a contact time that is sufficient to trigger electric circuitry The proposed acceleration switch can be used as a wake up sensor for zero power Internet of Things nodes

Please use this identifier to cite or link to this item:

http://hdl.handle.net/10453/171627