Silicon Electrothermal Microactuators as Zero Standby Power Local Temperature Switches

Wong, HX; Koh, Y; Goh, DJ; Sharma, J; Merugu, S; Lee, JE-Y

Silicon Electrothermal Microactuators as Zero Standby Power Local Temperature Switches

Wong, HX Koh, Y Goh, DJ Sharma, J Merugu, S Lee, JE-Y

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Publisher:: IEEE
Publication Type:: Conference Proceeding
Citation:: 2022 IEEE Sensors, 2022, 2022-October, pp. 1-4
Issue Date:: 2022-12-08

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Full metadata record

Field	Value	Language
dc.contributor.author	Wong, HX
dc.contributor.author	Koh, Y
dc.contributor.author	Goh, DJ
dc.contributor.author	Sharma, J
dc.contributor.author	Merugu, S
dc.contributor.author	Lee, JE-Y
dc.date	2022-10-30
dc.date.accessioned	2023-07-24T22:20:44Z
dc.date.available	2023-07-24T22:20:44Z
dc.date.issued	2022-12-08
dc.identifier.citation	2022 IEEE Sensors, 2022, 2022-October, pp. 1-4
dc.identifier.isbn	978-1-6654-8464-0
dc.identifier.issn	1930-0395
dc.identifier.issn	2168-9229
dc.identifier.uri	http://hdl.handle.net/10453/171634
dc.description.abstract	The bent beam structure is a well known elec trothermal actuator based on asymmetric thermal expansion but is less commonly used for sensors In this work a silicon based bent beam structure was fabricated on Silicon on Insulator SOl wafers to realise a local temperature sensitive switch The novel sensor switch closes a 0 7 mu mathrm m gap when locally heated above 80 C yet is unperturbed when the ambient temperature is raised up to 150 C We used thermal imaging to analyse the temperature distributions for different heating schemes and modelled the results with finite element simulations The results show that these structures are attractive candidates for zero standby power surface sensitive temperature switches
dc.language	en
dc.publisher	IEEE
dc.relation.ispartof	2022 IEEE Sensors
dc.relation.ispartof	IEEE Sensors
dc.relation.isbasedon	10.1109/sensors52175.2022.9967110
dc.rights	info:eu-repo/semantics/restrictedAccess
dc.title	Silicon Electrothermal Microactuators as Zero Standby Power Local Temperature Switches
dc.type	Conference Proceeding
utslib.citation.volume	2022-October
utslib.location.activity	Dallas, TX, USA
pubs.organisational-group	/University of Technology Sydney
pubs.organisational-group	/University of Technology Sydney/Faculty of Engineering and Information Technology
pubs.organisational-group	/University of Technology Sydney/Faculty of Engineering and Information Technology/School of Electrical and Data Engineering
utslib.copyright.status	in_progress	*
pubs.consider-herdc	false
dc.date.updated	2023-07-24T22:20:41Z
pubs.finish-date	2022-11-02
pubs.place-of-publication	Piscataway, USA
pubs.publication-status	Published
pubs.start-date	2022-10-30
pubs.volume	2022-October
dc.location	Piscataway, USA

Abstract:

The bent beam structure is a well known elec trothermal actuator based on asymmetric thermal expansion but is less commonly used for sensors In this work a silicon based bent beam structure was fabricated on Silicon on Insulator SOl wafers to realise a local temperature sensitive switch The novel sensor switch closes a 0 7 mu mathrm m gap when locally heated above 80 C yet is unperturbed when the ambient temperature is raised up to 150 C We used thermal imaging to analyse the temperature distributions for different heating schemes and modelled the results with finite element simulations The results show that these structures are attractive candidates for zero standby power surface sensitive temperature switches

Please use this identifier to cite or link to this item:

http://hdl.handle.net/10453/171634