Long-Range High-Resolution Imaging With Silicon-on-Nothing ScAlN pMUTs

Sarafianou, M; Choong, DSW; Chen, DSH; Goh, DJ; Yao, Z; Sharma, J; Merugu, S; Ng, EJ; Lee, JEY

Long-Range High-Resolution Imaging With Silicon-on-Nothing ScAlN pMUTs

Sarafianou, M Choong, DSW Chen, DSH Goh, DJ Yao, Z Sharma, J Merugu, S Ng, EJ Lee, JEY

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Publisher:: IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Publication Type:: Journal Article
Citation:: IEEE Sensors Journal, 2023, 23, (20), pp. 24254-24263
Issue Date:: 2023-10-15

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Field	Value	Language
dc.contributor.author	Sarafianou, M
dc.contributor.author	Choong, DSW
dc.contributor.author	Chen, DSH
dc.contributor.author	Goh, DJ
dc.contributor.author	Yao, Z
dc.contributor.author	Sharma, J
dc.contributor.author	Merugu, S
dc.contributor.author	Ng, EJ
dc.contributor.author	Lee, JEY
dc.date.accessioned	2024-01-15T04:41:34Z
dc.date.available	2024-01-15T04:41:34Z
dc.date.issued	2023-10-15
dc.identifier.citation	IEEE Sensors Journal, 2023, 23, (20), pp. 24254-24263
dc.identifier.issn	1530-437X
dc.identifier.issn	1558-1748
dc.identifier.uri	http://hdl.handle.net/10453/174447
dc.description.abstract	This work demonstrates the imaging capabilities of a silicon-on-nothing (SON) ScAlN piezoelectric micromachined ultrasonic transducer (pMUT) array by a method of transmit beamforming followed by suitable signal postprocessing for 3-D image reconstruction. A 2.7-MHz pMUT array with 15% scandium-doped aluminum nitride (ScAlN) as the piezo thin film was implemented for this demonstration. A total of 16 3 × 3-mm dies consisting of 34 × 37 pMUT elements per die and operated as dual channels were arranged in an eight-column × two-row array configuration, resulting in a 32-channel experimental system with a 24×6-mm coverage. In this work, experimental testing using single and multiple 6-mm-diameter reflectors at a different spacing from each other and a distance of 2.5 cm from the array was performed to validate the 3-D imaging capabilities of the developed 2-D SON ScAlN pMUT array with an attained lateral resolution of 5 mm.
dc.language	English
dc.publisher	IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
dc.relation.ispartof	IEEE Sensors Journal
dc.relation.isbasedon	10.1109/JSEN.2023.3302354
dc.rights	info:eu-repo/semantics/closedAccess
dc.subject	0205 Optical Physics, 0906 Electrical and Electronic Engineering, 0913 Mechanical Engineering
dc.subject.classification	Analytical Chemistry
dc.subject.classification	40 Engineering
dc.title	Long-Range High-Resolution Imaging With Silicon-on-Nothing ScAlN pMUTs
dc.type	Journal Article
utslib.citation.volume	23
utslib.for	0205 Optical Physics
utslib.for	0906 Electrical and Electronic Engineering
utslib.for	0913 Mechanical Engineering
pubs.organisational-group	/University of Technology Sydney
pubs.organisational-group	/University of Technology Sydney/Faculty of Engineering and Information Technology
pubs.organisational-group	/University of Technology Sydney/Faculty of Engineering and Information Technology/School of Electrical and Data Engineering
utslib.copyright.status	closed_access	*
dc.date.updated	2024-01-15T04:41:28Z
pubs.issue	20
pubs.publication-status	Published
pubs.volume	23
utslib.citation.issue	20

Abstract:

This work demonstrates the imaging capabilities of a silicon-on-nothing (SON) ScAlN piezoelectric micromachined ultrasonic transducer (pMUT) array by a method of transmit beamforming followed by suitable signal postprocessing for 3-D image reconstruction. A 2.7-MHz pMUT array with 15% scandium-doped aluminum nitride (ScAlN) as the piezo thin film was implemented for this demonstration. A total of 16 3 × 3-mm dies consisting of 34 × 37 pMUT elements per die and operated as dual channels were arranged in an eight-column × two-row array configuration, resulting in a 32-channel experimental system with a 24×6-mm coverage. In this work, experimental testing using single and multiple 6-mm-diameter reflectors at a different spacing from each other and a distance of 2.5 cm from the array was performed to validate the 3-D imaging capabilities of the developed 2-D SON ScAlN pMUT array with an attained lateral resolution of 5 mm.

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http://hdl.handle.net/10453/174447