Long-Range High-Resolution Imaging With Silicon-on-Nothing ScAlN pMUTs
- Publisher:
- IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
- Publication Type:
- Journal Article
- Citation:
- IEEE Sensors Journal, 2023, 23, (20), pp. 24254-24263
- Issue Date:
- 2023-10-15
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This work demonstrates the imaging capabilities of a silicon-on-nothing (SON) ScAlN piezoelectric micromachined ultrasonic transducer (pMUT) array by a method of transmit beamforming followed by suitable signal postprocessing for 3-D image reconstruction. A 2.7-MHz pMUT array with 15% scandium-doped aluminum nitride (ScAlN) as the piezo thin film was implemented for this demonstration. A total of 16 3 × 3-mm dies consisting of 34 × 37 pMUT elements per die and operated as dual channels were arranged in an eight-column × two-row array configuration, resulting in a 32-channel experimental system with a 24×6-mm coverage. In this work, experimental testing using single and multiple 6-mm-diameter reflectors at a different spacing from each other and a distance of 2.5 cm from the array was performed to validate the 3-D imaging capabilities of the developed 2-D SON ScAlN pMUT array with an attained lateral resolution of 5 mm.
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