DC-Bias Effects on Sputtered PZT pMUTs with High Transmit and Receive Sensitivities in Immersion for Imaging applications
- Publisher:
- IEEE
- Publication Type:
- Conference Proceeding
- Citation:
- 2023 IEEE International Ultrasonics Symposium (IUS), 2023, 00, pp. 1-4
- Issue Date:
- 2023-11-07
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Filename | Description | Size | |||
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IUS2023_ID1549_v1.pdf | Submitted version | 12.31 MB |
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This work reports a 7 5MHz sputtered Lead Zirconate Titanate PZT piezoelectric micromachined ultrasonic transducer pMUT array that demonstrates both strong transmit 9 3kPa V mm2 and receive performance 6 5V MPa characterized in immersion without signal amplification and within a 5mm2 aperture This paper presents yet higher RX sensitivities for the proposed device even with a direct connection to an oscilloscope We elucidate the effect of DC bias on the acoustic transmit TX and receive RX characteristics of PZT pMUTs and how these could be tuned to increase the performance of the pMUTs The device was fabricated at wafer scale in our 8 inch line which is capable of physical vapor deposition PVD of high quality PZT
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