Performance Analysis of Wideband PMUTs: a Comparative Study Between Sol-Gel PZT, PVD PZT, and 15% ScAlN-Based Arrays Through Experimental Evaluation

Savoia, AS; Giusti, D; Prelini, C; Chang, P; Leotti, A; Lee, J; Koh, Y; Ferrera, M

Performance Analysis of Wideband PMUTs: a Comparative Study Between Sol-Gel PZT, PVD PZT, and 15% ScAlN-Based Arrays Through Experimental Evaluation

Savoia, AS Giusti, D Prelini, C Chang, P Leotti, A Lee, J Koh, Y Ferrera, M

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Publisher:: IEEE
Publication Type:: Conference Proceeding
Citation:: 2023 IEEE International Ultrasonics Symposium (IUS), 2023, 00, pp. 1-4
Issue Date:: 2023-11-07

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Field	Value	Language
dc.contributor.author	Savoia, AS
dc.contributor.author	Giusti, D
dc.contributor.author	Prelini, C
dc.contributor.author	Chang, P
dc.contributor.author	Leotti, A
dc.contributor.author	Lee, J
dc.contributor.author	Koh, Y
dc.contributor.author	Ferrera, M
dc.date	2023-09-03
dc.date.accessioned	2024-02-06T06:10:59Z
dc.date.available	2024-02-06T06:10:59Z
dc.date.issued	2023-11-07
dc.identifier.citation	2023 IEEE International Ultrasonics Symposium (IUS), 2023, 00, pp. 1-4
dc.identifier.isbn	9798350346459
dc.identifier.issn	1948-5719
dc.identifier.issn	1948-5727
dc.identifier.uri	http://hdl.handle.net/10453/175372
dc.description.abstract	In the design of Piezoelectric Micromachined Ultrasonic Transducers PMUTs for wideband immersion operation the choice of piezoelectric material is crucial for determining transducer performance The sensitivity bandwidth and maximum transmit TX pressure are significantly impacted by the selected material thereby determining the suitability of PMUTs for various application scenarios such as medical imaging wearables and implants This work reports on an experimental comparative analysis of wideband PMUT performance when designed and fabricated using sol gel SG Lead Titanate Zirconate PZT Physical Vapor Deposition PVD PZT and 15 Scandium doped Aluminum Nitride ScAlN aiming to provide insights for optimizing PMUT design by selecting the most appropriate material for specific applications
dc.language	en
dc.publisher	IEEE
dc.relation.ispartof	2023 IEEE International Ultrasonics Symposium (IUS)
dc.relation.ispartof	2023 IEEE International Ultrasonics Symposium
dc.relation.isbasedon	10.1109/ius51837.2023.10307094
dc.rights	info:eu-repo/semantics/closedAccess
dc.title	Performance Analysis of Wideband PMUTs: a Comparative Study Between Sol-Gel PZT, PVD PZT, and 15% ScAlN-Based Arrays Through Experimental Evaluation
dc.type	Conference Proceeding
utslib.citation.volume	00
utslib.location.activity	Montreal, QC, Canada
pubs.organisational-group	University of Technology Sydney
pubs.organisational-group	University of Technology Sydney/Faculty of Engineering and Information Technology
pubs.organisational-group	University of Technology Sydney/Faculty of Engineering and Information Technology/School of Electrical and Data Engineering
utslib.copyright.status	closed_access	*
dc.date.updated	2024-02-06T06:10:58Z
pubs.finish-date	2023-09-08
pubs.publication-status	Published
pubs.start-date	2023-09-03
pubs.volume	00

Abstract:

In the design of Piezoelectric Micromachined Ultrasonic Transducers PMUTs for wideband immersion operation the choice of piezoelectric material is crucial for determining transducer performance The sensitivity bandwidth and maximum transmit TX pressure are significantly impacted by the selected material thereby determining the suitability of PMUTs for various application scenarios such as medical imaging wearables and implants This work reports on an experimental comparative analysis of wideband PMUT performance when designed and fabricated using sol gel SG Lead Titanate Zirconate PZT Physical Vapor Deposition PVD PZT and 15 Scandium doped Aluminum Nitride ScAlN aiming to provide insights for optimizing PMUT design by selecting the most appropriate material for specific applications

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http://hdl.handle.net/10453/175372