Thin-film PMUTs: A Review of 40 Years of Research

Roy, K Lee, JE-Y Lee, C

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Field	Value	Language
dc.contributor.author	Roy, K
dc.contributor.author	Lee, JE-Y
dc.contributor.author	Lee, C
dc.date.accessioned	2024-02-07T23:08:20Z
dc.date.available	2024-02-07T23:08:20Z
dc.date.issued	2023-01-13
dc.identifier.citation	arXiv, 2023
dc.identifier.uri	http://hdl.handle.net/10453/175462
dc.language	en
dc.relation.ispartof	arXiv
dc.relation.isbasedon	10.48550/arxiv.2301.05814
dc.rights	info:eu-repo/semantics/closedAccess
dc.title	Thin-film PMUTs: A Review of 40 Years of Research
dc.type	preprint
pubs.organisational-group	University of Technology Sydney
pubs.organisational-group	University of Technology Sydney/Faculty of Engineering and Information Technology
pubs.organisational-group	University of Technology Sydney/Faculty of Engineering and Information Technology/School of Electrical and Data Engineering
utslib.copyright.status	closed_access	*
dc.date.updated	2024-02-07T23:08:18Z

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