Integrated and Robust Fabry-Perot Humidity Sensor Based on Metal-Organic Framework onto Fiber-Optic Facet

Liu, S; Zhang, X; Wang, Q; Chen, S; Wang, F; Wang, J; Wang, G; Yang, W; Huang, M

Integrated and Robust Fabry-Perot Humidity Sensor Based on Metal-Organic Framework onto Fiber-Optic Facet

Liu, S Zhang, X Wang, Q Chen, S

Wang, F Wang, J Wang, G Yang, W Huang, M

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Publisher:: IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Publication Type:: Journal Article
Citation:: IEEE Sensors Journal, 2023, 23, (12), pp. 12906-12914
Issue Date:: 2023-06-15

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Field	Value	Language
dc.contributor.author	Liu, S
dc.contributor.author	Zhang, X
dc.contributor.author	Wang, Q
dc.contributor.author	Chen, S https://orcid.org/0000-0001-9992-2264
dc.contributor.author	Wang, F
dc.contributor.author	Wang, J
dc.contributor.author	Wang, G
dc.contributor.author	Yang, W
dc.contributor.author	Huang, M
dc.date.accessioned	2024-03-26T04:32:05Z
dc.date.available	2024-03-26T04:32:05Z
dc.date.issued	2023-06-15
dc.identifier.citation	IEEE Sensors Journal, 2023, 23, (12), pp. 12906-12914
dc.identifier.issn	1530-437X
dc.identifier.issn	1558-1748
dc.identifier.uri	http://hdl.handle.net/10453/177180
dc.description.abstract	An integrated and robust fiber-optic Fabry-Perot (FP) humidity sensor based on the metal-organic framework (MOF) material FIR-53 is presented and characterized for the first time, along with its implementation method. Noticeably, the FIR-53 crystal was chosen as the moisture-sensitive material, due to its large porosity and chemical tailorability. By connecting the single-mode fiber (SMF) with FIR-53 using polydimethylsiloxane (PDMS) rationally, our sensor, whose FP cavity was formed by FIR-53, monitors the spectrum peak shift caused by humidity change. The experiments revealed that the proposed sensor had a sensitivity of 315 pm/% relative humidity (RH) in the range of 10%-90% RH, and also good linearity, reversibility, long-time stability, and antihigh-temperature interference resistance. To summarize, the proposed sensor has the advantages of easy fabrication and low cost, and is highly sensitive to humidity, which is going to have significant potential in the field of humidity sensing and promote the research and application of new fiber-optic sensors for humidity.
dc.language	English
dc.publisher	IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
dc.relation.ispartof	IEEE Sensors Journal
dc.relation.isbasedon	10.1109/JSEN.2023.3273905
dc.rights	info:eu-repo/semantics/closedAccess
dc.subject	0205 Optical Physics, 0906 Electrical and Electronic Engineering, 0913 Mechanical Engineering
dc.subject.classification	Analytical Chemistry
dc.subject.classification	40 Engineering
dc.title	Integrated and Robust Fabry-Perot Humidity Sensor Based on Metal-Organic Framework onto Fiber-Optic Facet
dc.type	Journal Article
utslib.citation.volume	23
utslib.for	0205 Optical Physics
utslib.for	0906 Electrical and Electronic Engineering
utslib.for	0913 Mechanical Engineering
pubs.organisational-group	University of Technology Sydney
pubs.organisational-group	University of Technology Sydney/Faculty of Engineering and Information Technology
pubs.organisational-group	University of Technology Sydney/Faculty of Engineering and Information Technology/School of Computer Science
utslib.copyright.status	closed_access	*
dc.date.updated	2024-03-26T04:32:04Z
pubs.issue	12
pubs.publication-status	Published
pubs.volume	23
utslib.citation.issue	12

Abstract:

An integrated and robust fiber-optic Fabry-Perot (FP) humidity sensor based on the metal-organic framework (MOF) material FIR-53 is presented and characterized for the first time, along with its implementation method. Noticeably, the FIR-53 crystal was chosen as the moisture-sensitive material, due to its large porosity and chemical tailorability. By connecting the single-mode fiber (SMF) with FIR-53 using polydimethylsiloxane (PDMS) rationally, our sensor, whose FP cavity was formed by FIR-53, monitors the spectrum peak shift caused by humidity change. The experiments revealed that the proposed sensor had a sensitivity of 315 pm/% relative humidity (RH) in the range of 10%-90% RH, and also good linearity, reversibility, long-time stability, and antihigh-temperature interference resistance. To summarize, the proposed sensor has the advantages of easy fabrication and low cost, and is highly sensitive to humidity, which is going to have significant potential in the field of humidity sensing and promote the research and application of new fiber-optic sensors for humidity.

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http://hdl.handle.net/10453/177180