Vibration mode shifting due to scale-dependency for cylindrical, conical, and spherical microshells

Publisher:
Elsevier
Publication Type:
Journal Article
Citation:
Structures, 2023, 57, pp. 105263
Issue Date:
2023-11
Full metadata record
Microshells structures are broadly utilized in micro electro mechanical systems MEMS such as microresonator microgyroscope microsensor microactuator microantenna and microgripper Taking into consideration the scale dependency in such a scale and the importance of vibration characteristics in design of such microstructures the current study aims to analyze the role of scale decency in mode shifting of common types of thin microshells in MEMS A scale dependent quadrilateral finite shell element based on the modified couple stress theory is developed to compute the frequencies and mode shapes of the system Verification studies are presented to display the accuracy of the established numerical model for the prediction of the vibrational response of microshells with and without scale dependency A comprehensive examination is then carried out to disclose the impact of material length scale parameters together with geometrical parameters and boundary conditions on the mode shifting of microscale cylindrical conical and spherical shells It is believed that the results of the present study are handy in the design of the microshells when the scale decency is of great importance
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