In-Air Long-Range Environmental Temperature Sensing with A Single Scandium-Doped Aluminum Nitride pMUT Array

Sarafianou, M; Chen, DSH; Wai Choong, DS; Goh, DJ; Liu, J; Merugu, S; Zhang, QX; Lin, H; Lee, SHJ; Chang, PHK; Lee, YL; Prelini, CL; D'Ercoli, F; Sim, DH; Leotti, A; Castoldi, L; Giusti, D; Lee, JEY

In-Air Long-Range Environmental Temperature Sensing with A Single Scandium-Doped Aluminum Nitride pMUT Array

Sarafianou, M Chen, DSH Wai Choong, DS Goh, DJ Liu, J Merugu, S Zhang, QX Lin, H Lee, SHJ Chang, PHK Lee, YL Prelini, CL D'Ercoli, F Sim, DH Leotti, A Castoldi, L Giusti, D Lee, JEY

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Publication Type:: Conference Proceeding
Citation:: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023, 2023, pp. 128-131
Issue Date:: 2023-01-01

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Field	Value	Language
dc.contributor.author	Sarafianou, M
dc.contributor.author	Chen, DSH
dc.contributor.author	Wai Choong, DS
dc.contributor.author	Goh, DJ
dc.contributor.author	Liu, J
dc.contributor.author	Merugu, S
dc.contributor.author	Zhang, QX
dc.contributor.author	Lin, H
dc.contributor.author	Lee, SHJ
dc.contributor.author	Chang, PHK
dc.contributor.author	Lee, YL
dc.contributor.author	Prelini, CL
dc.contributor.author	D'Ercoli, F
dc.contributor.author	Sim, DH
dc.contributor.author	Leotti, A
dc.contributor.author	Castoldi, L
dc.contributor.author	Giusti, D
dc.contributor.author	Lee, JEY
dc.date.accessioned	2024-06-13T05:43:14Z
dc.date.available	2024-06-13T05:43:14Z
dc.date.issued	2023-01-01
dc.identifier.citation	2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023, 2023, pp. 128-131
dc.identifier.uri	http://hdl.handle.net/10453/179513
dc.description.abstract	This paper presents, for the first time, in-air long-range temperature sensing by ultrasound using a single Scandium-doped (15%) Aluminum Nitride (ScAlN) pMUT array. The proposed temperature pulse-echo sensing setup can achieve an impressive 97% accuracy (and a respective average absolute error of 1.4°C) in temperature sensing at 30cm (corresponding to 60cm of round-trip distance) for temperatures up to 90°C. This is accomplished using a single 9mm2 die without any signal pre/post-amplification with a range that could comfortably be extended to 1m.
dc.language	en
dc.relation.ispartof	2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023
dc.rights	info:eu-repo/semantics/embargoedAccess
dc.title	In-Air Long-Range Environmental Temperature Sensing with A Single Scandium-Doped Aluminum Nitride pMUT Array
dc.type	Conference Proceeding
pubs.organisational-group	University of Technology Sydney
pubs.organisational-group	University of Technology Sydney/Faculty of Engineering and Information Technology
pubs.organisational-group	University of Technology Sydney/Faculty of Engineering and Information Technology/School of Electrical and Data Engineering
utslib.copyright.status	embargoed	*
utslib.copyright.embargo	2025-01-01T00:00:00+1000Z
dc.date.updated	2024-06-13T05:43:12Z
pubs.publication-status	Published

Abstract:

This paper presents, for the first time, in-air long-range temperature sensing by ultrasound using a single Scandium-doped (15%) Aluminum Nitride (ScAlN) pMUT array. The proposed temperature pulse-echo sensing setup can achieve an impressive 97% accuracy (and a respective average absolute error of 1.4°C) in temperature sensing at 30cm (corresponding to 60cm of round-trip distance) for temperatures up to 90°C. This is accomplished using a single 9mm2 die without any signal pre/post-amplification with a range that could comfortably be extended to 1m.

Please use this identifier to cite or link to this item:

http://hdl.handle.net/10453/179513