Piezoelectric Micromachined Ultrasonic Transducer Enables Bubble-Based Stirring and Reconfigurable Particle Patterning

Li, X; Qian, J; Zhang, J; Zhang, B; Lee, JEY; Zhang, W

Piezoelectric Micromachined Ultrasonic Transducer Enables Bubble-Based Stirring and Reconfigurable Particle Patterning

Li, X Qian, J Zhang, J Zhang, B Lee, JEY Zhang, W

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Publication Type:: Conference Proceeding
Citation:: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023, 2023, pp. 903-906
Issue Date:: 2023-01-01

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Field	Value	Language
dc.contributor.author	Li, X
dc.contributor.author	Qian, J
dc.contributor.author	Zhang, J
dc.contributor.author	Zhang, B
dc.contributor.author	Lee, JEY
dc.contributor.author	Zhang, W
dc.date.accessioned	2024-06-14T02:22:11Z
dc.date.available	2024-06-14T02:22:11Z
dc.date.issued	2023-01-01
dc.identifier.citation	2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023, 2023, pp. 903-906
dc.identifier.uri	http://hdl.handle.net/10453/179523
dc.description.abstract	This paper presents a novel on-chip acoustofluidic manipulation technique that uses a piezoelectric micromachined ultrasonic transducer (PMUT) to fuse two functions: bubble-based stirring and reconfigurable particle patterning. The unique merits of this platform include (1) highly localized acoustic actuation without using a power amplifier; (2) ultra-low sample volumes for rapid bioanalysis; (3) potential for high throughput by device integration; (4) CMOS compatibility for sensing; (5) ease of switching between functions by adjusting the frequency for multiple modes of patterning.
dc.language	en
dc.relation.ispartof	2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023
dc.rights	info:eu-repo/semantics/closedAccess
dc.title	Piezoelectric Micromachined Ultrasonic Transducer Enables Bubble-Based Stirring and Reconfigurable Particle Patterning
dc.type	Conference Proceeding
pubs.organisational-group	University of Technology Sydney
pubs.organisational-group	University of Technology Sydney/Faculty of Engineering and Information Technology
pubs.organisational-group	University of Technology Sydney/Faculty of Engineering and Information Technology/School of Electrical and Data Engineering
utslib.copyright.status	closed_access	*
dc.date.updated	2024-06-14T02:22:10Z
pubs.publication-status	Published

Abstract:

This paper presents a novel on-chip acoustofluidic manipulation technique that uses a piezoelectric micromachined ultrasonic transducer (PMUT) to fuse two functions: bubble-based stirring and reconfigurable particle patterning. The unique merits of this platform include (1) highly localized acoustic actuation without using a power amplifier; (2) ultra-low sample volumes for rapid bioanalysis; (3) potential for high throughput by device integration; (4) CMOS compatibility for sensing; (5) ease of switching between functions by adjusting the frequency for multiple modes of patterning.

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http://hdl.handle.net/10453/179523