Near Zero-Power Environment Temperature Micromechanical Sensor-Switch Enabled by Sub-Micron Gap

Goh, DJ; Koh, Y; Ghosh, S; Sharma, J; Teo, YS; Lal, A; Lee, JEY

Near Zero-Power Environment Temperature Micromechanical Sensor-Switch Enabled by Sub-Micron Gap

Goh, DJ Koh, Y Ghosh, S Sharma, J Teo, YS Lal, A Lee, JEY

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Publication Type:: Conference Proceeding
Citation:: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023, 2023, pp. 1683-1686
Issue Date:: 2023-01-01

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Field	Value	Language
dc.contributor.author	Goh, DJ
dc.contributor.author	Koh, Y
dc.contributor.author	Ghosh, S
dc.contributor.author	Sharma, J
dc.contributor.author	Teo, YS
dc.contributor.author	Lal, A
dc.contributor.author	Lee, JEY
dc.date.accessioned	2024-06-17T04:43:14Z
dc.date.available	2024-06-17T04:43:14Z
dc.date.issued	2023-01-01
dc.identifier.citation	2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023, 2023, pp. 1683-1686
dc.identifier.uri	http://hdl.handle.net/10453/179530
dc.description.abstract	In this work, we present a novel zero-power cantilever type temperature sensor-switch with a sub-micron (~700nm) contact gap. The sub-micron gap enables the device to switch on at just 10°C above room temperature for environmental temperature sensing. The device comprises a bimorph cantilever comprising Silicon (Si) and Aluminum (Al), with Titanium Nitride (TiN) switch contacts at the free end. We successfully demonstrate switch activation at 35°C, drawing an on-state power of <3μW while consuming near zero-power in the off-state. The device could be applied to monitor food storage temperatures where the sensor, as part of a wireless sensor node, is triggered when the room temperature goes above the warning level but draws nearly zero-power otherwise.
dc.language	en
dc.relation.ispartof	2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023
dc.rights	info:eu-repo/semantics/closedAccess
dc.title	Near Zero-Power Environment Temperature Micromechanical Sensor-Switch Enabled by Sub-Micron Gap
dc.type	Conference Proceeding
pubs.organisational-group	University of Technology Sydney
pubs.organisational-group	University of Technology Sydney/Faculty of Engineering and Information Technology
pubs.organisational-group	University of Technology Sydney/Faculty of Engineering and Information Technology/School of Electrical and Data Engineering
utslib.copyright.status	closed_access	*
dc.date.updated	2024-06-17T04:43:12Z
pubs.publication-status	Published

Abstract:

In this work, we present a novel zero-power cantilever type temperature sensor-switch with a sub-micron (~700nm) contact gap. The sub-micron gap enables the device to switch on at just 10°C above room temperature for environmental temperature sensing. The device comprises a bimorph cantilever comprising Silicon (Si) and Aluminum (Al), with Titanium Nitride (TiN) switch contacts at the free end. We successfully demonstrate switch activation at 35°C, drawing an on-state power of <3μW while consuming near zero-power in the off-state. The device could be applied to monitor food storage temperatures where the sensor, as part of a wireless sensor node, is triggered when the room temperature goes above the warning level but draws nearly zero-power otherwise.

Please use this identifier to cite or link to this item:

http://hdl.handle.net/10453/179530