Close Range and High Resolution Detection of Vibration By Ultrasonic Wave Using Silicon-On-Nothing PMUTs

Koh, Y; Chen, DS-H; Sarafianou, M; Sharma, J; Goh, DJ; Choong, DSW; Ng, EJ; Lee, JE-Y

Close Range and High Resolution Detection of Vibration By Ultrasonic Wave Using Silicon-On-Nothing PMUTs

Koh, Y Chen, DS-H Sarafianou, M Sharma, J Goh, DJ Choong, DSW Ng, EJ Lee, JE-Y

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Publisher:: Institute of Electrical and Electronics Engineers (IEEE)
Publication Type:: Journal Article
Citation:: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2024, pp. 1-1
Issue Date:: 2024

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Full metadata record

Field	Value	Language
dc.contributor.author	Koh, Y
dc.contributor.author	Chen, DS-H
dc.contributor.author	Sarafianou, M
dc.contributor.author	Sharma, J
dc.contributor.author	Goh, DJ
dc.contributor.author	Choong, DSW
dc.contributor.author	Ng, EJ
dc.contributor.author	Lee, JE-Y
dc.date.accessioned	2024-08-28T01:19:13Z
dc.date.available	2024-08-28T01:19:13Z
dc.date.issued	2024
dc.identifier.citation	IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2024, pp. 1-1
dc.identifier.issn	0885-3010
dc.identifier.issn	1525-8955
dc.identifier.uri	http://hdl.handle.net/10453/180566
dc.language	en
dc.publisher	Institute of Electrical and Electronics Engineers (IEEE)
dc.relation.ispartof	IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
dc.relation.isbasedon	10.1109/tuffc.2024.3448481
dc.rights	info:eu-repo/semantics/embargoedAccess
dc.subject	02 Physical Sciences, 09 Engineering
dc.subject.classification	Acoustics
dc.subject.classification	40 Engineering
dc.subject.classification	51 Physical sciences
dc.title	Close Range and High Resolution Detection of Vibration By Ultrasonic Wave Using Silicon-On-Nothing PMUTs
dc.type	Journal Article
utslib.for	02 Physical Sciences
utslib.for	09 Engineering
pubs.organisational-group	University of Technology Sydney
pubs.organisational-group	University of Technology Sydney/Faculty of Engineering and Information Technology
pubs.organisational-group	University of Technology Sydney/Faculty of Engineering and Information Technology/School of Electrical and Data Engineering
pubs.organisational-group	University of Technology Sydney/All Manual Groups
pubs.organisational-group	University of Technology Sydney/All Manual Groups/Centre for Audio, Acoustics and Vibration (CAAV)
utslib.copyright.status	open_access	*
utslib.copyright.embargo	2026-08-26T00:00:00+1000Z
dc.date.updated	2024-08-28T01:19:11Z
pubs.publication-status	Published

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http://hdl.handle.net/10453/180566