Temperature Coefficients of Transverse Elastic Properties of Scandium-Doped Aluminum Nitride (ScAlN) Thin Film Grown on Preformed Cavities

Ghosh, S; Ramegowda, PC; Goh, DJ; Sharma, J; Koh, Y; Lee, J

Temperature Coefficients of Transverse Elastic Properties of Scandium-Doped Aluminum Nitride (ScAlN) Thin Film Grown on Preformed Cavities

Ghosh, S Ramegowda, PC Goh, DJ Sharma, J Koh, Y Lee, J

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Publisher:: Institute of Electrical and Electronics Engineers (IEEE)
Publication Type:: Conference Proceeding
Citation:: 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS), 2024, 00, pp. 1-4
Issue Date:: 2024-01-26

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Field	Value	Language
dc.contributor.author	Ghosh, S
dc.contributor.author	Ramegowda, PC
dc.contributor.author	Goh, DJ
dc.contributor.author	Sharma, J
dc.contributor.author	Koh, Y
dc.contributor.author	Lee, J
dc.date	2024-09-22
dc.date.accessioned	2025-01-02T10:42:54Z
dc.date.available	2025-01-02T10:42:54Z
dc.date.issued	2024-01-26
dc.identifier.citation	2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS), 2024, 00, pp. 1-4
dc.identifier.uri	http://hdl.handle.net/10453/182853
dc.language	en
dc.publisher	Institute of Electrical and Electronics Engineers (IEEE)
dc.relation.ispartof	2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS)
dc.relation.ispartof	2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS)
dc.relation.isbasedon	10.1109/uffc-js60046.2024.10793542
dc.rights	info:eu-repo/semantics/openAccess
dc.title	Temperature Coefficients of Transverse Elastic Properties of Scandium-Doped Aluminum Nitride (ScAlN) Thin Film Grown on Preformed Cavities
dc.type	Conference Proceeding
utslib.citation.volume	00
pubs.organisational-group	University of Technology Sydney
pubs.organisational-group	University of Technology Sydney/Faculty of Engineering and Information Technology
pubs.organisational-group	University of Technology Sydney/Faculty of Engineering and Information Technology/School of Electrical and Data Engineering
pubs.organisational-group	University of Technology Sydney/UTS Groups
pubs.organisational-group	University of Technology Sydney/UTS Groups/Centre for Audio, Acoustics and Vibration (CAAV)
utslib.copyright.status	open_access	*
dc.date.updated	2025-01-02T10:42:52Z
pubs.finish-date	2024-09-26
pubs.publication-status	Published
pubs.start-date	2024-09-22
pubs.volume	00

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http://hdl.handle.net/10453/182853