Towards Unparallelled CMOS-compatible Air-coupled pMUT Performance with 30% Sc-doped AlN through an Analysis of Residual Stress Effects

Liu, J; Jian, GD; Chen, DS-H; Wai, DCS; Shyam, T; Ramegowda, PC; Srinivas, M; Huamao, L; Xin, ZQ; Kee, PCH; Das, A; Sciarrone, A; Leotti, A; Giusti, D; Lee, JE-Y; Koh, Y

Towards Unparallelled CMOS-compatible Air-coupled pMUT Performance with 30% Sc-doped AlN through an Analysis of Residual Stress Effects

Liu, J Jian, GD Chen, DS-H Wai, DCS Shyam, T Ramegowda, PC Srinivas, M Huamao, L Xin, ZQ Kee, PCH Das, A Sciarrone, A Leotti, A Giusti, D Lee, JE-Y Koh, Y

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Publisher:: Institute of Electrical and Electronics Engineers (IEEE)
Publication Type:: Conference Proceeding
Citation:: 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS), 2024, 00, pp. 1-4
Issue Date:: 2024-01-26

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Field	Value	Language
dc.contributor.author	Liu, J
dc.contributor.author	Jian, GD
dc.contributor.author	Chen, DS-H
dc.contributor.author	Wai, DCS
dc.contributor.author	Shyam, T
dc.contributor.author	Ramegowda, PC
dc.contributor.author	Srinivas, M
dc.contributor.author	Huamao, L
dc.contributor.author	Xin, ZQ
dc.contributor.author	Kee, PCH
dc.contributor.author	Das, A
dc.contributor.author	Sciarrone, A
dc.contributor.author	Leotti, A
dc.contributor.author	Giusti, D
dc.contributor.author	Lee, JE-Y
dc.contributor.author	Koh, Y
dc.date	2024-09-22
dc.date.accessioned	2025-01-02T10:45:26Z
dc.date.available	2025-01-02T10:45:26Z
dc.date.issued	2024-01-26
dc.identifier.citation	2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS), 2024, 00, pp. 1-4
dc.identifier.uri	http://hdl.handle.net/10453/182855
dc.language	en
dc.publisher	Institute of Electrical and Electronics Engineers (IEEE)
dc.relation.ispartof	2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS)
dc.relation.ispartof	2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS)
dc.relation.isbasedon	10.1109/uffc-js60046.2024.10794013
dc.rights	info:eu-repo/semantics/restrictedAccess
dc.title	Towards Unparallelled CMOS-compatible Air-coupled pMUT Performance with 30% Sc-doped AlN through an Analysis of Residual Stress Effects
dc.type	Conference Proceeding
utslib.citation.volume	00
pubs.organisational-group	University of Technology Sydney
pubs.organisational-group	University of Technology Sydney/Faculty of Engineering and Information Technology
pubs.organisational-group	University of Technology Sydney/Faculty of Engineering and Information Technology/School of Electrical and Data Engineering
pubs.organisational-group	University of Technology Sydney/UTS Groups
pubs.organisational-group	University of Technology Sydney/UTS Groups/Centre for Audio, Acoustics and Vibration (CAAV)
utslib.copyright.status	recently_added	*
dc.date.updated	2025-01-02T10:45:25Z
pubs.finish-date	2024-09-26
pubs.publication-status	Published
pubs.start-date	2024-09-22
pubs.volume	00

Please use this identifier to cite or link to this item:

http://hdl.handle.net/10453/182855