Fabrication of thin, luminescent, single-crystal diamond membranes

Publisher:
Amer Inst Physics
Publication Type:
Journal article
Citation:
Magyar, Andrew et al. 2011, 'Fabrication of thin, luminescent, single-crystal diamond membranes', Applied Physics Letters, vol. 99, no. 8, pp. 081913-1-081913-4.
Issue Date:
2011
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The formation of single-crystal diamond membranes is an important prerequisite for the fabrication of high-quality optical cavities in this material. Diamond membranes fabricated using lift-off processes involving the creation of a damaged layer through
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