A magnetically levitated synchronous permanent magnet planar motor with concentric structure winding used for lithography machine

Publication Type:
Journal Article
Citation:
Journal of Applied Physics, 2015, 117 (17)
Issue Date:
2015-05-07
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© 2015 AIP Publishing LLC. A novel magnetically levitated synchronous permanent magnet planar motor (MLSPMPM) with concentric structure winding, which can be used in lithography machine, is proposed in this paper. Topology and principle of the new MLSPMPM are introduced. The scalar magnetic potential is used to solve the magnetic system, and the differential equations are solved by the separation of variables method according to the boundary conditions. Characteristics, such as flux density, electromagnetic force, and back-EMF of the MLSPMPM, are obtained analytically. All of the results are validated by the finite element method. A prototype of the MLSPMPM is manufactured. Based on the prototype motor, some experiments are carried out. The measured results are used to showcase the validity of the analytical analysis.
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