A magnetically levitated synchronous permanent magnet planar motor with concentric structure winding used for lithography machine

Zhang, L; Kou, B; Xing, F; Jin, Y; Zhang, H; Zhu, J

A magnetically levitated synchronous permanent magnet planar motor with concentric structure winding used for lithography machine

Zhang, L Kou, B Xing, F Jin, Y Zhang, H Zhu, J

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Publication Type:: Journal Article
Citation:: Journal of Applied Physics, 2015, 117 (17)
Issue Date:: 2015-05-07

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Field	Value	Language
dc.contributor.author	Zhang, L	en_US
dc.contributor.author	Kou, B	en_US
dc.contributor.author	Xing, F	en_US
dc.contributor.author	Jin, Y	en_US
dc.contributor.author	Zhang, H	en_US
dc.contributor.author	Zhu, J https://orcid.org/0000-0002-9763-4047	en_US
dc.date.issued	2015-05-07	en_US
dc.identifier.citation	Journal of Applied Physics, 2015, 117 (17)	en_US
dc.identifier.issn	0021-8979	en_US
dc.identifier.uri	http://hdl.handle.net/10453/36358
dc.description.abstract	© 2015 AIP Publishing LLC. A novel magnetically levitated synchronous permanent magnet planar motor (MLSPMPM) with concentric structure winding, which can be used in lithography machine, is proposed in this paper. Topology and principle of the new MLSPMPM are introduced. The scalar magnetic potential is used to solve the magnetic system, and the differential equations are solved by the separation of variables method according to the boundary conditions. Characteristics, such as flux density, electromagnetic force, and back-EMF of the MLSPMPM, are obtained analytically. All of the results are validated by the finite element method. A prototype of the MLSPMPM is manufactured. Based on the prototype motor, some experiments are carried out. The measured results are used to showcase the validity of the analytical analysis.	en_US
dc.relation.ispartof	Journal of Applied Physics	en_US
dc.relation.isbasedon	10.1063/1.4917332	en_US
dc.subject.classification	Applied Physics	en_US
dc.title	A magnetically levitated synchronous permanent magnet planar motor with concentric structure winding used for lithography machine	en_US
dc.type	Journal Article
utslib.citation.volume	17	en_US
utslib.citation.volume	117	en_US
utslib.for	090607 Power and Energy Systems Engineering (excl. Renewable Power)	en_US
utslib.for	01 Mathematical Sciences	en_US
utslib.for	02 Physical Sciences	en_US
utslib.for	09 Engineering	en_US
pubs.embargo.period	Not known	en_US
pubs.organisational-group	/University of Technology Sydney
pubs.organisational-group	/University of Technology Sydney/Faculty of Engineering and Information Technology
pubs.organisational-group	/University of Technology Sydney/Faculty of Engineering and Information Technology/School of Electrical and Data Engineering
pubs.organisational-group	/University of Technology Sydney/Strength - CCET - Centre for Clean Energy Technology
utslib.copyright.status	closed_access
pubs.issue	17	en_US
pubs.publication-status	Published	en_US
pubs.volume	117	en_US

Abstract:

© 2015 AIP Publishing LLC. A novel magnetically levitated synchronous permanent magnet planar motor (MLSPMPM) with concentric structure winding, which can be used in lithography machine, is proposed in this paper. Topology and principle of the new MLSPMPM are introduced. The scalar magnetic potential is used to solve the magnetic system, and the differential equations are solved by the separation of variables method according to the boundary conditions. Characteristics, such as flux density, electromagnetic force, and back-EMF of the MLSPMPM, are obtained analytically. All of the results are validated by the finite element method. A prototype of the MLSPMPM is manufactured. Based on the prototype motor, some experiments are carried out. The measured results are used to showcase the validity of the analytical analysis.

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http://hdl.handle.net/10453/36358