Browsing byAuthorHur, YJ
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Issue Date | Title | Author(s) |
---|---|---|
2022-12-01 | Correlation of Wafer-scale Film Stress Effects on ScAlN pMUT Parameters | Choong, DSW; Goh, DJ; Liu, J; Merugu, S; Zhang, QX; Lee, HK; Chang, P; Leotti, A; Tan, H-S; Magbujos, V; Hur, YJ; Lin, H; Chadnra Rao, BSS; Ghosh, S; Ramegowda, PC; Chen, DS-H; Giusti, D; Quaglia, F; Ng, EJ; Lee, JE-Y |