Browsing byAuthorTerashima, K
Showing results 1 to 2 of 2
Issue Date | Title | Author(s) |
---|---|---|
2013-11-01 | Ashing of photoresists using dielectric barrier discharge cryoplasmas | Stauss, S; Mori, S; Muneoka, H; Terashima, K; Iacopi, F |
2011-03-07 | Cryogenic plasmas for controlled processing of nanoporous materials | Iacopi, F; Choi, JH; Terashima, K; Rice, PM; Dubois, G |