Design and applications of MEMS flow sensors: A review

Ejeian, F; Azadi, S; Razmjou, A; Orooji, Y; Kottapalli, A; Ebrahimi Warkiani, M; Asadnia, M

Design and applications of MEMS flow sensors: A review

Ejeian, F Azadi, S Razmjou, A Orooji, Y Kottapalli, A Ebrahimi Warkiani, M

Asadnia, M

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Publication Type:: Journal Article
Citation:: Sensors and Actuators, A: Physical, 2019, 295 pp. 483 - 502
Issue Date:: 2019-08-15

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Field	Value	Language
dc.contributor.author	Ejeian, F	en_US
dc.contributor.author	Azadi, S	en_US
dc.contributor.author	Razmjou, A	en_US
dc.contributor.author	Orooji, Y	en_US
dc.contributor.author	Kottapalli, A	en_US
dc.contributor.author	Ebrahimi Warkiani, M https://orcid.org/0000-0002-4184-1944	en_US
dc.contributor.author	Asadnia, M	en_US
dc.date.issued	2019-08-15	en_US
dc.identifier.citation	Sensors and Actuators, A: Physical, 2019, 295 pp. 483 - 502	en_US
dc.identifier.issn	0924-4247	en_US
dc.identifier.uri	http://hdl.handle.net/10453/135070
dc.description.abstract	© 2019 Elsevier B.V. There is an indispensable need for fluid flow rate and direction sensors in various medical, industrial and environmental applications. Besides the critical demands on sensing range of flow parameters (such as rate, velocity, direction and temperature), the properties of different target gases or liquids to be sensed pose challenges to the development of reliable, inexpensive and low powered sensors. This paper presents an overview of the work done on design and development of Microelectromechanical system (MEMS)-based flow sensors in recent years. In spite of using some similar principles, diverse production methods, analysis strategies, and different sensing materials, MEMS flow sensors can be broadly categorized into three main types, namely thermal sensors, piezoresistive sensors and piezoelectric sensors. Additionally, some key challenges and future prospects for the use of the MEMS flow sensors are discussed briefly.	en_US
dc.relation.ispartof	Sensors and Actuators, A: Physical	en_US
dc.relation.isbasedon	10.1016/j.sna.2019.06.020	en_US
dc.rights	info:eu-repo/semantics/closedAccess
dc.subject.classification	Nanoscience & Nanotechnology	en_US
dc.title	Design and applications of MEMS flow sensors: A review	en_US
dc.type	Journal Article
utslib.citation.volume	295	en_US
utslib.for	0906 Electrical and Electronic Engineering	en_US
utslib.for	0912 Materials Engineering	en_US
utslib.for	0913 Mechanical Engineering	en_US
pubs.embargo.period	Not known	en_US
pubs.organisational-group	/University of Technology Sydney
pubs.organisational-group	/University of Technology Sydney/Faculty of Engineering and Information Technology
pubs.organisational-group	/University of Technology Sydney/Faculty of Engineering and Information Technology/School of Biomedical Engineering
pubs.organisational-group	/University of Technology Sydney/Strength - CHT - Health Technologies
pubs.organisational-group	/University of Technology Sydney/Strength - IBMD - Initiative for Biomedical Devices
utslib.copyright.status	closed_access	*
pubs.publication-status	Published	en_US
pubs.volume	295	en_US

Abstract:

© 2019 Elsevier B.V. There is an indispensable need for fluid flow rate and direction sensors in various medical, industrial and environmental applications. Besides the critical demands on sensing range of flow parameters (such as rate, velocity, direction and temperature), the properties of different target gases or liquids to be sensed pose challenges to the development of reliable, inexpensive and low powered sensors. This paper presents an overview of the work done on design and development of Microelectromechanical system (MEMS)-based flow sensors in recent years. In spite of using some similar principles, diverse production methods, analysis strategies, and different sensing materials, MEMS flow sensors can be broadly categorized into three main types, namely thermal sensors, piezoresistive sensors and piezoelectric sensors. Additionally, some key challenges and future prospects for the use of the MEMS flow sensors are discussed briefly.

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http://hdl.handle.net/10453/135070