Ultra-high sensitive micro-chemo-mechanical hydrogen sensor integrated by palladium-based driver and high-performance piezoresistor

Li, H; Li, Y; Wang, K; Lai, L; Xu, X; Sun, B; Yang, Z; Ding, G

Ultra-high sensitive micro-chemo-mechanical hydrogen sensor integrated by palladium-based driver and high-performance piezoresistor

Li, H Li, Y Wang, K Lai, L Xu, X

Sun, B Yang, Z Ding, G

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Publisher:: Elsevier
Publication Type:: Journal Article
Citation:: International Journal of Hydrogen Energy, 2021, 46, (1), pp. 1434-1445
Issue Date:: 2021-01-01

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Field	Value	Language
dc.contributor.author	Li, H
dc.contributor.author	Li, Y
dc.contributor.author	Wang, K
dc.contributor.author	Lai, L
dc.contributor.author	Xu, X https://orcid.org/0000-0002-2598-3766
dc.contributor.author	Sun, B
dc.contributor.author	Yang, Z
dc.contributor.author	Ding, G
dc.date.accessioned	2022-02-22T02:27:23Z
dc.date.available	2022-02-22T02:27:23Z
dc.date.issued	2021-01-01
dc.identifier.citation	International Journal of Hydrogen Energy, 2021, 46, (1), pp. 1434-1445
dc.identifier.issn	0360-3199
dc.identifier.uri	http://hdl.handle.net/10453/154763
dc.description.abstract	Abstract A novel resistive chemical-mechanical sensor for hydrogen gas detection was designed and manufactured by using MEMS processing technology. The sensor combines a composite piezoresistor of silver nanowires-polyimide and a palladium sputtered microcantilever, and the optimized structure of which has been obtained through theoretical and simulation analysis. With a series of experimental testing, the fabricated sensor achieved the ultra-high sensitivity of 2825, 8071, 28250 and 47083 for hydrogen detection at the concentration of 0.4%, 0.8%, 1.2%, 1.6% and 2.0%, respectively. The ultra-high sensitive detection for hydrogen was enabled from the synergistic function of both the surface resistance effect between the palladium coated cantilever and silver nanowires-polyimide piezoresistor, and the bulk resistance effect of the silver nanowires-polyimide piezoresistor. In addition, the sensor also demonstrates excellent stability, which has high potential for practical hydrogen gas detection.
dc.language	en
dc.publisher	Elsevier
dc.relation.ispartof	International Journal of Hydrogen Energy
dc.relation.isbasedon	10.1016/j.ijhydene.2020.10.013
dc.rights	info:eu-repo/semantics/closedAccess
dc.subject	03 Chemical Sciences, 09 Engineering
dc.subject.classification	Energy
dc.title	Ultra-high sensitive micro-chemo-mechanical hydrogen sensor integrated by palladium-based driver and high-performance piezoresistor
dc.type	Journal Article
utslib.citation.volume	46
utslib.for	03 Chemical Sciences
utslib.for	09 Engineering
pubs.organisational-group	/University of Technology Sydney
pubs.organisational-group	/University of Technology Sydney/Faculty of Engineering and Information Technology
pubs.organisational-group	/University of Technology Sydney/Faculty of Engineering and Information Technology/School of Biomedical Engineering
pubs.organisational-group	/University of Technology Sydney/Strength - IBMD - Initiative for Biomedical Devices
utslib.copyright.status	closed_access	*
pubs.consider-herdc	false
dc.date.updated	2022-02-22T02:27:22Z
pubs.issue	1
pubs.publication-status	Published
pubs.volume	46
utslib.citation.issue	1

Abstract:

Abstract A novel resistive chemical-mechanical sensor for hydrogen gas detection was designed and manufactured by using MEMS processing technology. The sensor combines a composite piezoresistor of silver nanowires-polyimide and a palladium sputtered microcantilever, and the optimized structure of which has been obtained through theoretical and simulation analysis. With a series of experimental testing, the fabricated sensor achieved the ultra-high sensitivity of 2825, 8071, 28250 and 47083 for hydrogen detection at the concentration of 0.4%, 0.8%, 1.2%, 1.6% and 2.0%, respectively. The ultra-high sensitive detection for hydrogen was enabled from the synergistic function of both the surface resistance effect between the palladium coated cantilever and silver nanowires-polyimide piezoresistor, and the bulk resistance effect of the silver nanowires-polyimide piezoresistor. In addition, the sensor also demonstrates excellent stability, which has high potential for practical hydrogen gas detection.

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http://hdl.handle.net/10453/154763