Fabrication of multi-layer polymeric micro-sieve having narrow slot pores with conventional ultraviolet-lithography and micro-fabrication techniques.

Ebrahimi Warkiani, M; Lou, C-P; Gong, H-Q

Fabrication of multi-layer polymeric micro-sieve having narrow slot pores with conventional ultraviolet-lithography and micro-fabrication techniques.

Ebrahimi Warkiani, M

Lou, C-P Gong, H-Q

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Publisher:: AMER INST PHYSICS
Publication Type:: Journal Article
Citation:: Biomicrofluidics, 2011, 5, (3), pp. 36504-365049
Issue Date:: 2011-09

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Field	Value	Language
dc.contributor.author	Ebrahimi Warkiani, M https://orcid.org/0000-0002-4184-1944
dc.contributor.author	Lou, C-P
dc.contributor.author	Gong, H-Q
dc.date.accessioned	2023-03-12T23:15:06Z
dc.date.available	2011-08-22
dc.date.available	2023-03-12T23:15:06Z
dc.date.issued	2011-09
dc.identifier.citation	Biomicrofluidics, 2011, 5, (3), pp. 36504-365049
dc.identifier.issn	1932-1058
dc.identifier.issn	1932-1058
dc.identifier.uri	http://hdl.handle.net/10453/167099
dc.description.abstract	Fast detection of waterborne pathogens is important for securing the hygiene of drinking water. Detection of pathogens in water at low concentrations and minute quantities demands rapid and efficient enrichment methods in order to improve the signal-to-noise ratio of bio-sensors. We propose and demonstrate a low cost and rapid method to fabricate a multi-layer polymeric micro-sieve using conventional lithography techniques. The micro-fabricated micro-sieves are made of several layers of SU-8 photoresist using multiple coating and exposure steps and a single developing process. The obtained micro-sieves have good mechanical properties, smooth surfaces, high porosity (≈40%), and narrow pore size distribution (coefficient of variation < 3.33%). Sample loading and back-flushing using the multi-layer micro-sieve resulted in more than 90% recovery of pathogens, which showed improved performance than current commercial filters.
dc.format	Print-Electronic
dc.language	eng
dc.publisher	AMER INST PHYSICS
dc.relation.ispartof	Biomicrofluidics
dc.relation.isbasedon	10.1063/1.3637630
dc.rights	info:eu-repo/semantics/closedAccess
dc.subject	0203 Classical Physics, 0915 Interdisciplinary Engineering, 1007 Nanotechnology
dc.subject.classification	Nanoscience & Nanotechnology
dc.title	Fabrication of multi-layer polymeric micro-sieve having narrow slot pores with conventional ultraviolet-lithography and micro-fabrication techniques.
dc.type	Journal Article
utslib.citation.volume	5
utslib.location.activity	United States
utslib.for	0203 Classical Physics
utslib.for	0915 Interdisciplinary Engineering
utslib.for	1007 Nanotechnology
pubs.organisational-group	/University of Technology Sydney
pubs.organisational-group	/University of Technology Sydney/Faculty of Engineering and Information Technology
pubs.organisational-group	/University of Technology Sydney/Strength - CHT - Health Technologies
pubs.organisational-group	/University of Technology Sydney/Faculty of Engineering and Information Technology/School of Biomedical Engineering
pubs.organisational-group	/University of Technology Sydney/Strength - IBMD - Initiative for Biomedical Devices
pubs.organisational-group	/University of Technology Sydney/Centre for Health Technologies (CHT)
utslib.copyright.status	closed_access	*
dc.date.updated	2023-03-12T23:15:02Z
pubs.issue	3
pubs.publication-status	Published
pubs.volume	5
utslib.citation.issue	3

Abstract:

Fast detection of waterborne pathogens is important for securing the hygiene of drinking water. Detection of pathogens in water at low concentrations and minute quantities demands rapid and efficient enrichment methods in order to improve the signal-to-noise ratio of bio-sensors. We propose and demonstrate a low cost and rapid method to fabricate a multi-layer polymeric micro-sieve using conventional lithography techniques. The micro-fabricated micro-sieves are made of several layers of SU-8 photoresist using multiple coating and exposure steps and a single developing process. The obtained micro-sieves have good mechanical properties, smooth surfaces, high porosity (≈40%), and narrow pore size distribution (coefficient of variation < 3.33%). Sample loading and back-flushing using the multi-layer micro-sieve resulted in more than 90% recovery of pathogens, which showed improved performance than current commercial filters.

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http://hdl.handle.net/10453/167099