Reliability of Heterogeneous Integration on Hybrid Substrate With Ajinomoto Build-Up Film
- Publisher:
- IEEE
- Publication Type:
- Conference Proceeding
- Citation:
- 2023 IEEE 73rd Electronic Components and Technology Conference (ECTC), 2023, 00, pp. 542-547
- Issue Date:
- 2023
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Filename | Description | Size | |||
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1707021.pdf | Published version | 1.36 MB |
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The hybrid substrate build up package substrate organic interposer solder joints underfill of 2 3D IC integration or multiple systems and heterogeneous integration is investigated The organic interposer of the hybrid substrate is fabricated by a fan out chip last on a temporary panel with two different kinds of dielectric materials namely the PID photoimageable dielectric and the ABF Ajinomoto Build Up Film These two hybrid substrates are supporting two chips The flatness of metal lines of the RDLs redistribution layers the quality of the hybrid substrate after chip to hybrid substrate bonding and the reliability of the solder joints between these two hybrid substrates will be presented
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